公开(公告)号：WO2020156769A1

公开(公告)日：2020-08-06

申请号：PCT/EP2020/050354

申请日：2020-01-09

Applicant: ASML NETHERLANDS B.V.

Inventor： HUBAUX, Arnaud ,  BECKERS, Johan, Franciscus, Maria ,  DAVIES, Dylan John David ,  KUNNEN, Johan, Gertrudis, Cornelis ,  PONGERS, Willem, Richard ,  DAWARE, Ajinkya, Ravindra ,  LI, Chung-Hsun ,  TSIROGIANNIS, Georgios ,  BORGER, Hendrik, Cornelis, Anton ,  DE JONG, Frederik Eduard ,  GONZALEZ HUESCA, Juan Manuel ,  HLOD, Andriy, Vasyliovich ,  PISARENCO, Maxim

IPC: G03F7/20 ,  G05B23/02 ,  G05B19/418

Abstract: Described is a method for categorizing a substrate subject to a semiconductor manufacturing process comprising multiple operations, the method comprising: obtaining values of functional indicators derived from data generated during one or more of the multiple operations on the substrate, the functional indicators characterizing at least one operation; applying a decision model comprising one or more threshold values to the values of the functional indicators to obtain one or more categorical indicators; and assigning a category to the substrate based on the one or more categorical indicators.

公开(公告)号：EP3918420A1

公开(公告)日：2021-12-08

申请号：EP20700456.5

申请日：2020-01-09

Applicant: ASML Netherlands B.V.

Inventor： HUBAUX, Arnaud ,  BECKERS, Johan, Franciscus, Maria ,  DAVIES, Dylan John David ,  KUNNEN, Johan, Gertrudis, Cornelis ,  PONGERS, Willem, Richard ,  DAWARE, Ajinkya, Ravindra ,  LI, Chung-Hsun ,  TSIROGIANNIS, Georgios ,  BORGER, Hendrik, Cornelis, Anton ,  DE JONG, Frederik Eduard ,  GONZALEZ HUESCA, Juan Manuel ,  HLOD, Andriy, Vasyliovich ,  PISARENCO, Maxim

IPC: G03F7/20 ,  G05B23/02 ,  G05B19/418