公开(公告)号：US20160070179A1

公开(公告)日：2016-03-10

申请号：US14787738

申请日：2014-04-16

Applicant: ASML NETHERLANDS B.V.

Inventor： Wilhelmus Patrick Elisabeth Maria OP 'T ROOT ,  Adrianus Leonardus Gertrudus BOMMER ,  Robert DE JONG ,  Frank EVERTS ,  Herman Philip GODFRIED ,  Roland Pieter STOLK ,  Paul VAN DER VEEN

IPC: G03F7/20

CPC classification number: G03F7/70558 ,  G03F7/70025 ,  G03F7/70516 ,  H01S3/0975 ,  H01S3/104 ,  H01S3/225

Abstract: A method of selecting a periodic modulation to be applied to a variable of a radiation source, wherein the source delivers radiation for projection onto a substrate and wherein there is relative motion between the substrate and the radiation at a scan speed, the method including: for a set of system parameters and for a position on the substrate, calculating a quantity, the quantity being a measure of the contribution to an energy dose delivered to the position that arises from the modulation being applied to the variable of the source, wherein the contribution to the energy dose is calculated as a convolution of: a profile of radiation, and a contribution to an irradiance of radiation delivered by the source; and selecting a modulation frequency at which the quantity for the set of system parameters and the position on the substrate satisfies a certain criteria.

Abstract translation: 选择要施加到辐射源的变量的周期性调制的方法，其中所述源传送用于投影到衬底上的辐射，并且其中以扫描速度存在所述衬底和所述辐射之间的相对运动，所述方法包括： 一组系统参数和用于基板上的位置的计算量，所述数量是对从应用于源的变量的调制产生的递送到位置的能量剂量的贡献的度量的量，其中贡献 能量剂量被计算为卷积：辐射曲线和对源发射的辐射的辐照度的贡献; 并且选择用于所述一组系统参数的量和所述基板上的位置的所述调制频率满足一定的标准。

公开(公告)号：US20170179677A1

公开(公告)日：2017-06-22

申请号：US14976829

申请日：2015-12-21

Applicant: CYMER, LLC ,  ASML NETHERLANDS B.V.

Inventor： Joshua Jon THORNES ,  Tanuj AGGARWAL ,  Kevin Michael O'BRIEN ,  Frank EVERTS ,  Herman Philip GODFRIED ,  Russell Allen BURDT

IPC: H01S3/13 ,  G03F7/20

CPC classification number: G01J11/00 ,  G01J1/0228 ,  G01J1/0448 ,  G01J1/4257 ,  G03F7/70041 ,  G03F7/70516 ,  G03F7/7055 ,  G03F7/70558 ,  G03F7/70575 ,  H01S3/0014 ,  H01S3/10046 ,  H01S3/10069

Abstract: Online calibration of laser performance as a function of the repetition rate at which the laser is operated is disclosed. The calibration can be periodic and carried out during a scheduled during a non-exposure period. Various criteria can be used to automatically select the repetition rates that result in reliable in-spec performance. The reliable values of repetition rates are then made available to the scanner as allowed values and the laser/scanner system is then permitted to use those allowed repetition rates.

公开(公告)号：US20180253014A1

公开(公告)日：2018-09-06

申请号：US15759358

申请日：2016-08-23

Applicant: ASML Netherlands B.V. ,  Cymer, LLC

Inventor： Frank EVERTS ,  Wilhelmus Patrick Elisabeth Maria OP 'T ROOT ,  Herman Philip GODFRIED ,  Joshua Jon THORNES ,  Kevin Michael O"BRIEN ,  Leon Pieter Paul SAANEN ,  Tanuj AGGARWAL

IPC: G03F7/20

CPC classification number: G03F7/70558 ,  G03F7/70008 ,  G03F7/70066 ,  G03F7/70525 ,  G03F7/70716

Abstract: A method of controlling output of a radiation source, the method including: periodically monitoring an output energy of the radiation source; determining a difference between a reference energy signal and the monitored output energy; determining a feedback value; determining a desired output energy of the radiation source for a subsequent time period; and controlling an input parameter of the radiation source in dependence on the determined desired output energy during the subsequent time period. If the magnitude of the determined difference between the monitored output energy of the radiation source and the reference energy signal exceeds a threshold value: the determined difference does not contribute to the feedback value; and the determined difference is spread over the subsequent time period according to a reference energy signal adjustment profile and the reference energy signal adjustment profile is added to the reference energy signal for the subsequent time period.