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公开(公告)号：WO2022128284A1
公开(公告)日：2022-06-23
申请号：PCT/EP2021/081686
申请日：2021-11-15
Applicant: ASML NETHERLANDS B.V.
Inventor： AKBULUT, Duygu , HASPESLAGH, Luc, Roger, Simonne , PANDEY, Nitesh , VAN DER WOORD, Ties, Wouter , BRONDANI TORRI, Guilherme , GOORDEN, Sebastianus, Adrianus , KLEIN, Alexander, Ludwig , OVERKAMP, Jim, Vincent , YEGEN, Halil, Gökay YEGEN , OSORIO OLIVEROS, Edgar, Alberto
Abstract: A micromirror array comprising: a substrate; a plurality of mirrors for reflecting incident light; for each mirror of the plurality of mirrors, at least one actuator for displacing the mirror and connected to the substrate; one or more pillars connecting the mirror to the at least one actuator; and for each mirror of the plurality of mirrors, a heat diffuser for diffusing heat from the mirror, the heat diffuser comprising a heat sink and a thermally conductive post connecting the heat sink to the mirror, wherein the heat sink comprises a flexible membrane, which allows the thermally conductive post to pivot when the mirror is displaced, and wherein the flexible membrane comprises a center portion and a peripheral portion, the center portion having a thickness greater than a thickness of the peripheral portion.
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Patent Agency Ranking
公开(公告)号：WO2022112037A1
公开(公告)日：2022-06-02
申请号：PCT/EP2021/081689
申请日：2021-11-15
Applicant: ASML NETHERLANDS B.V.
Inventor： HASPESLAGH, Luc, Roger, Simonne , HUMBLET, Alexis , PANDEY, Nitesh , VAN DER WOORD, Ties, Wouter , YEGEN, Halil, Gökay , GOORDEN, Sebastianus, Adrianus , KLEIN, Alexander, Ludwig , OVERKAMP, Jim, Vincent , OSORIO OLIVEROS, Edgar, Alberto
Abstract: A microelectromechanical system, MEMS, comprises a MEMS wafer comprising an array of MEMS elements partitioned into a plurality of sub-arrays. A respective local control unit is provided for each sub-array a respective local control unit arranged to perform read/write communication with each MEMS element of the corresponding sub-array. The MEMS further includes a control wafer comprising a control circuit for controlling the array of MEMS elements. The control circuit is configured to transmit and receive data signals to and from each of the local control units using, for each control unit, a respective plurality of through silicon vias, TSV, in the control wafer. The control circuit is operative to control the array of MEMS elements using the data signals passed between the control circuit and the local control units, which comprise data signals relating to specific ones of the MEMS elements of the corresponding sub-array of MEMS elements.
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公开(公告)号：WO2022112027A1
公开(公告)日：2022-06-02
申请号：PCT/EP2021/081584
申请日：2021-11-12
Applicant: ASML NETHERLANDS B.V.
Inventor： HASPESLAGH, Luc, Roger, Simonne , PANDEY, Nitesh , VAN DER WOORD, Ties, Wouter , YEGEN, Halil, Gökay YEGEN , OVERKAMP, Jim, Vincent , BRONDANI TORRI, Guilherme , GOORDEN, Sebastianus, Adrianus , KLEIN, Alexander, Ludwig , OSORIO OLIVEROS, Edgar, Alberto
IPC: G03F7/20 , G02B26/08 , H01L41/047 , H01L41/083
Abstract: A micromirror array comprises a substrate, a plurality of mirrors for reflecting incident light and, for each mirror of the plurality of mirrors, at least one multilayer piezoelectric actuator for displacing the mirror, wherein the at least one multilayer piezoelectric actuator is connected to the substrate, and wherein the at least one multilayer piezoelectric actuator comprises a plurality of piezoelectric layers of piezoelectric material interleaved with a plurality of electrode layers to form a stack of layers. Also disclosed is a method of forming such a micromirror array. The micromirror array may be used in a programmable illuminator. The programmable illuminator may be used in a lithographic apparatus and/or in an inspection and/or metrology apparatus.
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公开(公告)号：WO2022111975A1
公开(公告)日：2022-06-02
申请号：PCT/EP2021/080873
申请日：2021-11-08
Applicant: ASML NETHERLANDS B.V.
Inventor： HASPESLAGH, Luc, Roger, Simonne , PANDEY, Nitesh , VAN DER WOORD, Ties, Wouter , YEGEN, Halil, Gökay , OVERKAMP, Jim, Vincent , GOORDEN, Sebastianus, Adrianus , HUMBLET, Alexis , KLEIN, Alexander, Ludwig , BRONDANI TORRI, Guilherme , OSORIO OLIVEROS, Edgar, Alberto
Abstract: A micromirror array comprises a substrate, a plurality of mirrors for reflecting incident light and, for each mirror of the plurality of mirrors, at least one piezoelectric actuator for displacing the mirror, wherein the at least one piezoelectric actuator is connected to the substrate. The micromirror array further comprises one or more pillars connecting the mirror to the at least one piezoelectric actuator. Also disclosed is a method of forming such a micromirror array. The micromirror array may be used in a programmable illuminator. The programmable illuminator may be used in a lithographic apparatus and/or in an inspection and/or metrology apparatus.
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公开(公告)号：EP4252074A1
公开(公告)日：2023-10-04
申请号：EP21807070.4
申请日：2021-11-08
Applicant: ASML Netherlands B.V.
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公开(公告)号：EP4260121A1
公开(公告)日：2023-10-18
申请号：EP21811329.8
申请日：2021-11-15
Applicant: ASML Netherlands B.V.
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