-
公开(公告)号：WO2021032484A1
公开(公告)日：2021-02-25
申请号：PCT/EP2020/072006
申请日：2020-08-05
Applicant: ASML NETHERLANDS B.V. , IMEC v.z.w.
Inventor： HASPESLAGH, Luc, Roger, Simonne , ROCHUS, Veronique , BRONDANI TORRI, Guilherme , HALBACH, Alexandre , PANDEY, Nitesh , GOORDEN, Sebastianus, Adrianus
Abstract: A micromirror array comprises a substrate, a plurality of mirrors for reflecting incident light, and for each mirror of the plurality of mirrors, a respective post connecting the substrate to the mirror. The micromirror array further comprises, for each mirror of the plurality of mirrors, one or more electrostatic actuators connected to the substrate for applying force to the post to displace the post relative to the substrate, thereby displacing the mirror. Also disclosed is a method of forming such a micromirror array. The micromirror array may be used in a programmable illuminator. The programmable illuminator may be used in a lithographic apparatus and/or in an inspection apparatus.
-
公开(公告)号：WO2022112027A1
公开(公告)日：2022-06-02
申请号：PCT/EP2021/081584
申请日：2021-11-12
Applicant: ASML NETHERLANDS B.V.
Inventor： HASPESLAGH, Luc, Roger, Simonne , PANDEY, Nitesh , VAN DER WOORD, Ties, Wouter , YEGEN, Halil, Gökay YEGEN , OVERKAMP, Jim, Vincent , BRONDANI TORRI, Guilherme , GOORDEN, Sebastianus, Adrianus , KLEIN, Alexander, Ludwig , OSORIO OLIVEROS, Edgar, Alberto
IPC: G03F7/20 , G02B26/08 , H01L41/047 , H01L41/083
Abstract: A micromirror array comprises a substrate, a plurality of mirrors for reflecting incident light and, for each mirror of the plurality of mirrors, at least one multilayer piezoelectric actuator for displacing the mirror, wherein the at least one multilayer piezoelectric actuator is connected to the substrate, and wherein the at least one multilayer piezoelectric actuator comprises a plurality of piezoelectric layers of piezoelectric material interleaved with a plurality of electrode layers to form a stack of layers. Also disclosed is a method of forming such a micromirror array. The micromirror array may be used in a programmable illuminator. The programmable illuminator may be used in a lithographic apparatus and/or in an inspection and/or metrology apparatus.
-
公开(公告)号：WO2022111975A1
公开(公告)日：2022-06-02
申请号：PCT/EP2021/080873
申请日：2021-11-08
Applicant: ASML NETHERLANDS B.V.
Inventor： HASPESLAGH, Luc, Roger, Simonne , PANDEY, Nitesh , VAN DER WOORD, Ties, Wouter , YEGEN, Halil, Gökay , OVERKAMP, Jim, Vincent , GOORDEN, Sebastianus, Adrianus , HUMBLET, Alexis , KLEIN, Alexander, Ludwig , BRONDANI TORRI, Guilherme , OSORIO OLIVEROS, Edgar, Alberto
Abstract: A micromirror array comprises a substrate, a plurality of mirrors for reflecting incident light and, for each mirror of the plurality of mirrors, at least one piezoelectric actuator for displacing the mirror, wherein the at least one piezoelectric actuator is connected to the substrate. The micromirror array further comprises one or more pillars connecting the mirror to the at least one piezoelectric actuator. Also disclosed is a method of forming such a micromirror array. The micromirror array may be used in a programmable illuminator. The programmable illuminator may be used in a lithographic apparatus and/or in an inspection and/or metrology apparatus.
-
公开(公告)号：WO2022128284A1
公开(公告)日：2022-06-23
申请号：PCT/EP2021/081686
申请日：2021-11-15
Applicant: ASML NETHERLANDS B.V.
Inventor： AKBULUT, Duygu , HASPESLAGH, Luc, Roger, Simonne , PANDEY, Nitesh , VAN DER WOORD, Ties, Wouter , BRONDANI TORRI, Guilherme , GOORDEN, Sebastianus, Adrianus , KLEIN, Alexander, Ludwig , OVERKAMP, Jim, Vincent , YEGEN, Halil, Gökay YEGEN , OSORIO OLIVEROS, Edgar, Alberto
Abstract: A micromirror array comprising: a substrate; a plurality of mirrors for reflecting incident light; for each mirror of the plurality of mirrors, at least one actuator for displacing the mirror and connected to the substrate; one or more pillars connecting the mirror to the at least one actuator; and for each mirror of the plurality of mirrors, a heat diffuser for diffusing heat from the mirror, the heat diffuser comprising a heat sink and a thermally conductive post connecting the heat sink to the mirror, wherein the heat sink comprises a flexible membrane, which allows the thermally conductive post to pivot when the mirror is displaced, and wherein the flexible membrane comprises a center portion and a peripheral portion, the center portion having a thickness greater than a thickness of the peripheral portion.
-
Patent Agency Ranking
公开(公告)号：WO2021032483A1
公开(公告)日：2021-02-25
申请号：PCT/EP2020/072005
申请日：2020-08-05
Applicant: ASML NETHERLANDS B.V. , IMEC V.Z.W.
Inventor： HASPESLAGH, Luc, Roger, Simonne , ROCHUS, Veronique , BRONDANI TORRI, Guilherme , PANDEY, Nitesh , GOORDEN, Sebastianus, Adrianus
Abstract: A micromirror array comprises a substrate, a plurality of mirrors for reflecting incident light and, for each mirror (20) of the plurality of mirrors, at least one piezoelectric actuator (21) for displacing the mirror, wherein the at least one piezoelectric actuator is connected to the substrate. The micromirror array further comprises one or more pillars (24) connecting the mirror to the at least one piezoelectric actuator. Also disclosed is a method of forming such a micromirror array. The micromirror array may be used in a programmable illuminator. The programmable illuminator may be used in a lithographic apparatus and/or in an inspection apparatus.
-
公开(公告)号：EP4252074A1
公开(公告)日：2023-10-04
申请号：EP21807070.4
申请日：2021-11-08
Applicant: ASML Netherlands B.V.
-
公开(公告)号：EP4018265A1
公开(公告)日：2022-06-29
申请号：EP20750273.3
申请日：2020-08-05
Applicant: ASML Netherlands B.V. , IMEC VZW
-
公开(公告)号：EP4018264A1
公开(公告)日：2022-06-29
申请号：EP20749909.6
申请日：2020-08-05
Applicant: ASML Netherlands B.V. , IMEC VZW
-
公开(公告)号：EP4260121A1
公开(公告)日：2023-10-18
申请号：EP21811329.8
申请日：2021-11-15
Applicant: ASML Netherlands B.V.
-
-
-
-
-
-
-
-
Search Results
9
records
(took 0.026 seconds)
