公开(公告)号：WO2021083773A1

公开(公告)日：2021-05-06

申请号：PCT/EP2020/079674

申请日：2020-10-21

Applicant: ASML NETHERLANDS B.V.

Inventor： CHEN, Tianming ,  KUAN, Chiyan ,  WANG, Yixiang ,  WANG, Zhi Po

IPC: H01J37/20 ,  H01J37/02

Abstract: A system for grounding a mask (50) using a grounding component are provided. Some embodiments of the system include a grounding component comprising a base and an extension protruding from the base and comprising a conductive prong (52) configured to contact a conductive layer (56) of the mask. Some embodiments of the system include a plurality of conductive prongs configured to contact multiple positions of a conductive layer of the mask. Some other embodiments of the system include an extension comprising various shapes.

公开(公告)号：EP4052277A1

公开(公告)日：2022-09-07

申请号：EP20797426.2

申请日：2020-10-21

Applicant: ASML Netherlands B.V.

Inventor： CHEN, Tianming ,  KUAN, Chiyan ,  WANG, Yixiang ,  WANG, Zhi Po

IPC: H01J37/20 ,  H01J37/02