公开(公告)号：WO2022223220A1

公开(公告)日：2022-10-27

申请号：PCT/EP2022/057476

申请日：2022-03-22

Applicant: ASML NETHERLANDS B.V.

Inventor： VAN DE MEERENDONK, Remco ,  DIRECKS, Daniel, Jozef, Maria ,  NAKIBOGLU, Günes ,  WATERSON, Nicholas, Peter ,  KLUGKIST, Joost, André ,  PEKELDER, Sven ,  VAN DER NET, Antonius, Johannus ,  JACOBS, Johannes, Henricus, Wilhelmus ,  OUDES, Jaap ,  JANSSEN, Gerardus, Arnoldus, Hendricus, Franciscus ,  VAN LIPZIG, Jeroen, Peterus, Johannes ,  VAN SANTVOORT, Johannes, Franciscus, Martinus

IPC: G03F7/20 ,  H01L21/67

Abstract: The invention provides a temperature conditioning system using conditioning liquid to condition a temperature of an object, comprising a conditioning conduit, a return conduit, a supply chamber, and a discharge chamber wherein the temperature conditioning system is arranged to provide a static pressure difference between the supply chamber outlet and the discharge chamber inlet to create a flow through the conditioning conduit. A lithography apparatus and a method of temperature conditioning an object is also described.

公开(公告)号：WO2022238069A1

公开(公告)日：2022-11-17

申请号：PCT/EP2022/059641

申请日：2022-04-11

Applicant: ASML NETHERLANDS B.V.

Inventor： VAN DE MEERENDONK, Remco ,  KUSTERS, Roan, Ireneo ,  WILBRINK, Mark, Wilhelmus, Ida, Maria ,  BRUST, Steve, Gregory ,  JANSSEN, Gerardus, Arnoldus, Hendricus, Franciscus ,  WATERSON, Nicholas, Peter ,  NAKIBOGLU, Günes

IPC: G03F7/20 ,  G03F7/70858 ,  G03F7/709

Abstract: The present invention relates to a flow restrictive element comprising an inlet part having a large cross-section entry and a small cross-section exit, an outlet part having a small cross-section entry and a large cross-section exit, and a spiral shaped tube having an inlet and an outlet, wherein the inlet is connected to the small cross-section exit of the inlet part and the outlet is connected to the small cross-section entry of the outlet part.

公开(公告)号：WO2021013441A1

公开(公告)日：2021-01-28

申请号：PCT/EP2020/066871

申请日：2020-06-18

Applicant: ASML NETHERLANDS B.V.

Inventor： NAKIBOGLU, Günes ,  WATERSON, Nicholas, Peter ,  VAN DE MEERENDONK, Remco ,  BRUST, Steve, Gregory ,  JAKOBS, Dirk, Martinus, Gerardus, Petrus, Wilhelmus ,  KOTTAPALLI, Shravan

IPC: G03F7/20

Abstract: Disclosed herein is a passive flow induced vibration (FIV) reduction system for use in a temperature conditioning system that controls the temperature of at least one component within a lithographic apparatus. This FIV reduction system comprises: a conduit that provides a flow path for a liquid through the system; a liquid filled cavity in fluid connection with the conduit, wherein the fluid connection is provided via one or more openings in the wall of the conduit; a membrane configured such that it separates the liquid in the liquid filled cavity from a gas at a substantially ambient pressure and the membrane is configured such that the compliance of the membrane reduces at least the low frequency FIVs in the liquid flowing through the conduit; and an end-stop located on the gas side of the membrane, wherein the end-stop is configured to limit the extent of deflection of the membrane.

公开(公告)号：WO2017194247A1

公开(公告)日：2017-11-16

申请号：PCT/EP2017/058076

申请日：2017-04-05

Applicant: ASML NETHERLANDS B.V.

Inventor： KRAMER, Gijs ,  HOUBEN, Martijn ,  WATERSON, Nicholas, Peter ,  LAURENT, Thibault, Simon, Mathieu ,  VAN DE VIJVER, Yuri, Johannes, Gabriël ,  VERMEULEN, Marcus, Martinus, Petrus, Adrianus ,  RAVENSBERGEN, Simon, Karel ,  CLOOSTERMAN, Vincentius, Fransiscus ,  TROMP, Siegfried, Alexander ,  BALTIS, Coen, Hubertus, Matheus ,  GERRITZEN, Justin, Johannes, Hermanus ,  ROSET, Niek, Jacobus, Johannes

IPC: G03F7/20

CPC classification number: G03F7/2041 ,  G03F7/70341 ,  G03F7/707 ,  G03F7/70716 ,  G03F7/70733

Abstract: An extraction body (67) is for a support apparatus (WT) of a lithographic apparatus. The support apparatus is configured to support an object (W). The extraction body is formed with an opening (91) at a surface (69) thereof. The opening extends within the extraction body forming a first passageway (90). The first passageway is configured to fluidly communicate an extraction channel (92) in the extraction body to liquid between the surface and the object. A first pressure in the extraction channel is less than ambient pressure. At least a part of the first passageway is sized and dimensioned such that when the liquid enters the first passageway via the opening, a second pressure in the first passageway associated with surface tension of the liquid is lower than the first pressure such that at least a portion of the liquid is retained in the first passageway.

Abstract translation: 提取体（67）用于光刻设备的支撑设备（WT）。 支撑装置被构造成支撑物体（W）。 提取体在其表面（69）处形成有开口（91）。 该开口在提取体内延伸形成第一通道（90）。 第一通道被构造成将提取体中的提取通道（92）流体连通至表面与物体之间的液体。 萃取通道中的第一压力小于环境压力。 至少所述第一通道的一部分的大小和尺寸，使得当液体进入通过所述开口的第一通道，与液体的表面张力相关联的所述第一通道的第二压力比第一压力这样降低至少一个 部分液体保留在第一通道中。

公开(公告)号：EP4102297A1

公开(公告)日：2022-12-14

申请号：EP21178831.0

申请日：2021-06-10

Applicant: ASML Netherlands B.V.

Inventor： VAN DE MEERENDONK, Remco ,  NAKIBOGLU, Günes ,  WATERSON, Nicholas, Peter ,  KLUGKIST, Joost, André ,  VAN DER NET, Antonius, Johannus ,  JACOBS, Johannes, Henricus, Wilhelmus ,  VAN LIPZIG, Jeroen, Peterus, Johannes ,  VAN SANTVOORT, Johannes, Franciscus, Martinus

IPC: G03F7/20 ,  H01L21/67

Abstract: The invention provides a temperature conditioning system using conditioning liquid to condition a temperature of an object, comprising a conditioning conduit, a return conduit, a supply chamber, and a discharge chamber wherein the temperature conditioning system is arranged to provide a static pressure difference between the supply chamber outlet and the discharge chamber inlet to create a flow through the conditioning conduit. A lithography apparatus and a method of temperature conditioning an object is also described.

公开(公告)号：EP4116771A1

公开(公告)日：2023-01-11

申请号：EP21184711.6

申请日：2021-07-09

Applicant: ASML Netherlands B.V.

Inventor： VAN DE MEERENDONK, Remco ,  KUSTERS, Roan ,  WILBRINK, Mark, Wilhelmus, Ida, Maria ,  BRUST, Steve, Gregory ,  JANSSEN, Gerardus, Arnoldus, Hendricus, Franciscus ,  WATERSON, Nicholas, Peter ,  NAKIBOGLU, Günes

IPC: G03F7/20

Abstract: The present invention relates to a flow restrictive element comprising
an inlet part having a large cross-section entry and a small cross-section exit,
an outlet part having a small cross-section entry and a large cross-section exit, and
a spiral shaped tube having an inlet and an outlet, wherein the inlet is connected to the small cross-section exit of the inlet part and the outlet is connected to the small cross-section entry of the outlet part.