公开(公告)号：WO2023083559A1

公开(公告)日：2023-05-19

申请号：PCT/EP2022/078619

申请日：2022-10-14

Applicant: ASML NETHERLANDS B.V.

Inventor： HOUBEN, Tim ,  PISARENCO, Maxim ,  HUISMAN, Thomas, Jarik ,  PU, Lingling ,  ZHOU, Jian ,  YU, Liangjiang ,  CHANG, Yi-Hsin ,  YEH, Yun- Ling

IPC: G06T5/00 ,  G06T5/50

Abstract: Systems and methods for image analysis include obtaining a plurality of simulation images and a plurality of non-simulation images both associated with a sample under inspection, at least one of the plurality of simulation images being a simulation image of a location on the sample not imaged by any of the plurality of non-simulation images; and training an unsupervised domain adaptation technique using the plurality of simulation images and the plurality of non-simulation images as inputs to reduce a difference between first intensity gradients of the plurality of simulation images and second intensity gradients of the plurality of non-simulation images.