公开(公告)号：WO2023083559A1

公开(公告)日：2023-05-19

申请号：PCT/EP2022/078619

申请日：2022-10-14

Applicant: ASML NETHERLANDS B.V.

Inventor： HOUBEN, Tim ,  PISARENCO, Maxim ,  HUISMAN, Thomas, Jarik ,  PU, Lingling ,  ZHOU, Jian ,  YU, Liangjiang ,  CHANG, Yi-Hsin ,  YEH, Yun- Ling

IPC: G06T5/00 ,  G06T5/50

Abstract: Systems and methods for image analysis include obtaining a plurality of simulation images and a plurality of non-simulation images both associated with a sample under inspection, at least one of the plurality of simulation images being a simulation image of a location on the sample not imaged by any of the plurality of non-simulation images; and training an unsupervised domain adaptation technique using the plurality of simulation images and the plurality of non-simulation images as inputs to reduce a difference between first intensity gradients of the plurality of simulation images and second intensity gradients of the plurality of non-simulation images.

公开(公告)号：WO2022128373A1

公开(公告)日：2022-06-23

申请号：PCT/EP2021/082756

申请日：2021-11-24

Applicant: ASML NETHERLANDS B.V.

Inventor： HOUBEN, Tim ,  HUISMAN, Thomas, Jarik ,  PISARENCO, Maxim ,  MIDDLEBROOKS, Scott, Anderson ,  BATISTAKIS, Chrysostomos ,  CAO, Yu

IPC: G06T7/593

Abstract: Described herein are system, method, and apparatus for determining three-dimensional (3D) information of a structure of a patterned substrate. The 3D information can be determined using one or more model configured to generate 3D information (e.g., depth information) using only a single image of a patterned substrate. In a method, the model is trained by obtaining a pair of stereo images of a structure of a patterned substrate. The model generates, using a first image of the pair of stereo images as input, disparity data between the first image and a second image, the disparity data being indicative of depth information associated with the first image. The disparity data is combined with the second image to generate a reconstructed image corresponding to the first image. Further, one or more model parameters are adjusted based on the disparity data, the reconstructed image, and the first image.