Patent search ap:("ASML NETHERLANDS BV") AND inv:"BROOMANS PETERJAN" Page 1

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发明专利
SUBSTRATE POSITIONING SYSTEM, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD. 未知

公开(公告)号：NL2011658A

公开(公告)日：2014-04-29

申请号：NL2011658

申请日：2013-10-22

Applicant: ASML NETHERLANDS BV

Inventor： PASCH ENGELBERTUS , JANSEN ALBERT , JEUNINK ANDRE , ADRIAENS JOHANNES , AUER FRANK , BROOMANS PETERJAN , COSIJNS SUZANNE , KOENEN WILLEM , SMIT SEBASTIAAN , VERMUNT JORIS WILHELMUS HENRICUS

IPC: G03F7/20 , G03F9/00

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