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公开(公告)号：KR20180070658A
公开(公告)日：2018-06-26
申请号：KR20187013952
申请日：2016-09-26
Applicant: ASML NETHERLANDS BV
Inventor： VAN HAREN RICHARD JOHANNES FRANCISCUS , MOS EVERHARDUS CORNELIS , TEN BERGE PETER , WARDENIER PETER HANZEN , JENSEN ERIK , CEKLI HAKKI ERGUN
IPC: G03F7/20
CPC classification number: G03F7/70625 , G03F7/705
Abstract: 본발명은, 패터닝디바이스를포함하는패터닝프로세스에서패터닝에러에관한정보를획득하는단계; 상기패터닝에러정보에따라수정장치에의해상기패터닝에러를수정하여도입된시간주기에걸친비선형성을결정하는단계; 및상기결정된비선형성에기초하여수정장치와함께사용하기위한패터닝에러오프셋을컴퓨터시스템에의해결정하는단계를포함하는방법을제공한다
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