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公开(公告)号：KR20180070658A
公开(公告)日：2018-06-26
申请号：KR20187013952
申请日：2016-09-26
Applicant: ASML NETHERLANDS BV
Inventor： VAN HAREN RICHARD JOHANNES FRANCISCUS , MOS EVERHARDUS CORNELIS , TEN BERGE PETER , WARDENIER PETER HANZEN , JENSEN ERIK , CEKLI HAKKI ERGUN
IPC: G03F7/20
CPC classification number: G03F7/70625 , G03F7/705
Abstract: 본발명은, 패터닝디바이스를포함하는패터닝프로세스에서패터닝에러에관한정보를획득하는단계; 상기패터닝에러정보에따라수정장치에의해상기패터닝에러를수정하여도입된시간주기에걸친비선형성을결정하는단계; 및상기결정된비선형성에기초하여수정장치와함께사용하기위한패터닝에러오프셋을컴퓨터시스템에의해결정하는단계를포함하는방법을제공한다
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公开(公告)号：KR20180072760A
公开(公告)日：2018-06-29
申请号：KR20187014163
申请日：2016-09-28
Applicant: ASML NETHERLANDS BV
Inventor： TEN BERGE PETER , MOS EVERHARDUS CORNELIS , VAN HAREN RICHARD JOHANNES FRANCISCUS , WARDENIER PETER HANZEN , JENSEN ERIK , KASTRUP BERNARDO , KUBIS MICHAEL , MULKENS JOHANNES CATHARINUS HUBERTUS , DECKERS DAVID FRANS SIMON , HENKE WOLFGANG HELMUT , LEE JOUNGCHEL
CPC classification number: G03F1/72 , G03F7/70425 , G03F7/70625
Abstract: 패터닝시스템의에칭툴에의해처리된이후에패턴의측정및/또는시뮬레이션결과를획득하는단계, 에칭로딩(etch loading) 효과에기인한패터닝오차를상기측정및/또는시뮬레이션결과에기초하여결정하는단계, 및컴퓨터시스템에의하여, 상기패터닝오차에기초하여, 상기패터닝시스템내에서상기에칭툴로부터업스트림에있는패터닝디바이스를수정하기위한및/또는수정장치를조절하기위한수정정보를생성하는단계를포함하고, 상기패터닝디바이스가상기수정정보에따라수정되고및/또는상기수정장치가상기수정정보에따라조절되는경우, 상기패터닝오차는정정가능오차로변환되고및/또는특정범위로감소되는, 방법.
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公开(公告)号：KR20180069044A
公开(公告)日：2018-06-22
申请号：KR20187013904
申请日：2016-09-26
Applicant: ASML NETHERLANDS BV
Inventor： TEN BERGE PETER , MOS EVERHARDUS CORNELIS , VAN HAREN RICHARD JOHANNES FRANCISCUS , WARDENIER PETER HANZEN , JENSEN ERIK
Abstract: 방법은, 컴퓨터시스템에의하여, 패터닝시스템내의패터닝디바이스를수반하는패터닝프로세스의고분해능패터닝오차정보를오차수학모델을사용하여모델링하는단계, 상기컴퓨터시스템에의하여, 패터닝디바이스수정툴에의하여이루어질수 있는패터닝오차의정정을정정수학모델을사용하여모델링하는단계 - 상기정정수학모델은상기오차수학모델과실질적으로동일한분해능을가짐 -, 및상기컴퓨터시스템에의하여, 상기오차수학모델에의하여모델링된패터닝오차정보에상기정정수학모델을적용함으로써, 상기패터닝디바이스수정툴을사용하여상기패터닝디바이스를수정하기위한수정정보를결정하는단계를포함한다.
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