公开(公告)号：NL2013700A

公开(公告)日：2015-05-27

申请号：NL2013700

申请日：2014-10-29

Applicant: ASML NETHERLANDS BV

Inventor： DERKS SANDER CATHARINA REINIER ,  CASIMIRI ERIC WILLEM FELIX ,  DIERICHS MARCEL MATHIJS THEODORE MARIE ,  OEMRAWSINGH SUMANT SUKDEW RAMANUJAN ,  EINDEN WILHELMUS THEODORUS ANTHONIUS JOHANNES ,  VELTHUIS JOHANNES FRANSISCUS MARIA ,  ZDRAVKOV ALEXANDER NIKOLOV ,  ZEIN EDDINE WASSIM

IPC: G03F7/20

Abstract: An apparatus comprising at least one sealing aperture (40) comprising a hollow part (41), having an inner surface (42), extending at an interface between different zones (50;60) of the apparatus; and a member (43) positioned in the hollow part configured to substantially transmit EUV radiation and to substantially filter non-EUV radiation at the interface; wherein the inner surface of the hollow part has a surface treatment configured to increase absorption of the non-EUV radiation that is transferred by the member to the hollow part.