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公开(公告)号：SG116611A1
公开(公告)日：2005-11-28
申请号：SG200502259
申请日：2005-04-13
Applicant: ASML NETHERLANDS BV
Inventor： ALEKSEY YURIEVICH KOLESNYCHENK , JOHANNES JACOBUS MATHEUS BASEL , SJOERD NICOLAAS LAMBERTUS DOND , CHRISTIAAN ALEXANDER HOOGENDAM , HANS JANSEN , JEROEN JOHANNES SOPHIA MARIA M , JOHANNES CATHARINUS HUBERTUS M , FELIX GODFRIED PETER PEETERS , BOB STREEFKERK , FRANCISCUS JOHANNES HERMAN MAR , HELMAR VAN SANTEN
IPC: G03F7/20 , H01L21/027
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