Patent search ap:("ASML NETHERLANDS BV") AND inv:"GIELIS JOOST" Page 1

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发明专利
POSITION CONTROL SYSTEM, LITHOGRAPHIC APPARATUS, AND METHOD TO CONTROL A POSITION OF A MOVABLE OBJECT. 未知

公开(公告)号：NL2006981A

公开(公告)日：2012-01-30

申请号：NL2006981

申请日：2011-06-22

Applicant: ASML NETHERLANDS BV

Inventor： SIMONS WILHELMUS , NIEUWELAAR NORBERTUS , HEERTJES MARCEL , GIELIS JOOST , HENDRIKS FERDINAND

IPC: G03F7/20 , G03F9/00 , H01L21/68

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