公开(公告)号：NL2006843A

公开(公告)日：2012-01-09

申请号：NL2006843

申请日：2011-05-25

Applicant: ASML NETHERLANDS BV

Inventor： BUTLER HANS ,  HEERTJES MARCEL

IPC: G03F7/20

公开(公告)号：NL2008007A

公开(公告)日：2012-07-23

申请号：NL2008007

申请日：2011-12-21

Applicant: ASML NETHERLANDS BV

Inventor： BREUKERS MARCUS ,  HEERTJES MARCEL ,  BOSCH NIELS JOHANNES MARIA

IPC: G03F7/20

Abstract: A lithographic apparatus comprises an object table for receiving an object, an actuator for moving the object table and a handler for transferring the object to or from the object table. The apparatus is provided with a controller operable connected with the actuator and/or the handler. The controller is programmed and/or arranged to drive the actuator and the handler so as to provide that the object table and the handler substantially follow each other in a direction perpendicular to a transfer direction during transfer in the transfer direction of the object to or from the object table.

公开(公告)号：NL2003634A

公开(公告)日：2010-05-17

申请号：NL2003634

申请日：2009-10-13

Applicant: ASML NETHERLANDS BV

Inventor： HEERTJES MARCEL

IPC: G03F7/20 ,  G03F9/00 ,  H01L21/68

公开(公告)号：NL2006981A

公开(公告)日：2012-01-30

申请号：NL2006981

申请日：2011-06-22

Applicant: ASML NETHERLANDS BV

Inventor： SIMONS WILHELMUS ,  NIEUWELAAR NORBERTUS ,  HEERTJES MARCEL ,  GIELIS JOOST ,  HENDRIKS FERDINAND

IPC: G03F7/20 ,  G03F9/00 ,  H01L21/68

公开(公告)号：NL2003993A

公开(公告)日：2010-07-26

申请号：NL2003993

申请日：2009-12-21

Applicant: ASML NETHERLANDS BV

Inventor： HEERTJES MARCEL ,  HENNEKENS DAAN

IPC: G03F7/20 ,  G03F9/00 ,  H01L21/68