公开(公告)号：NL2006981A

公开(公告)日：2012-01-30

申请号：NL2006981

申请日：2011-06-22

Applicant: ASML NETHERLANDS BV

Inventor： SIMONS WILHELMUS ,  NIEUWELAAR NORBERTUS ,  HEERTJES MARCEL ,  GIELIS JOOST ,  HENDRIKS FERDINAND

IPC: G03F7/20 ,  G03F9/00 ,  H01L21/68

公开(公告)号：NL2010166A

公开(公告)日：2013-08-26

申请号：NL2010166

申请日：2013-01-23

Applicant: ASML NETHERLANDS BV

Inventor： NIEUWELAAR NORBERTUS ,  GILS PETRUS FRANCISCUS ,  SWAVING ARTHUR ERLAND

IPC: G03F7/20

Abstract: A substrate handler for transferring substrates to be exposed from a track to a lithographic apparatus. The substrate handler comprises a controller. The controller is configured to determine an instance for starting a transfer process of a first one of the substrates. The instance is based on a predetermined processing characteristic of the lithographic apparatus, in order to maintain a transfer period of the substrate in the substrate handler substantially constant.

公开(公告)号：NL2006818A

公开(公告)日：2012-01-03

申请号：NL2006818

申请日：2011-05-20

Applicant: ASML NETHERLANDS BV

Inventor： GROUWSTRA CEDRIC ,  KEMPER NICOLAAS ,  NIEUWELAAR NORBERTUS ,  VRIES DIRK ,  LI HUA ,  JOCHEMSEN MARINUS

IPC: G03F7/20 ,  H01L21/68

Abstract: A method of adjusting speed and/or routing of a part of a movement plan of a table under an immersion fluid supply system of a lithographic apparatus. The method includes splitting the movement plan of the table into a plurality of discrete movements; determining a risk of a bubble of a size greater than a certain size being present in immersion fluid through which a patterned beam of the lithographic apparatus will pass during a certain discrete movement by determining whether the immersion fluid supply system passes over a position at which immersion fluid leaked from the immersion fluid supply system is present; and adjusting the speed and/or routing of a part of the movement plan corresponding to (i) a discrete movement earlier than a discrete movement for which the risk of a bubble is determined, and/or (ii) a discrete movement for which the risk of a bubble is determined.