Patent search ap:("ASML NETHERLANDS BV") AND inv:"IZIKSON PAVEL" Page 1

1.

发明专利
LITHOGRAPHY SYSTEM AND A MACHINE LEARNING CONTROLLER FOR SUCH A LITHOGRAPHY SYSTEM. 未知

公开(公告)号：NL2013249A

公开(公告)日：2015-02-23

申请号：NL2013249

申请日：2014-07-24

Applicant: ASML NETHERLANDS BV

Inventor： SCHMITT-WEAVER EMIL , HENKE WOLFGANG , HOOGENBOOM THOMAS , IZIKSON PAVEL , LUEHRMANN PAUL , SLOTBOOM DAAN , STAECKER JENS , YPMA ALEXANDER

IPC: G03F7/20

Patent Agency Ranking