公开(公告)号：JP2006352115A

公开(公告)日：2006-12-28

申请号：JP2006157945

申请日：2006-06-07

Applicant: ASML NETHERLANDS BV

Inventor： BAGGEN MARCEL KOENRAAD MARIE ,  BIJVOET DIRK-JAN ,  LAMBERTUS DONDERS SJOERD NICOL ,  HOOGKAMP JAN FREDERIK ,  JANSEN ALBERT JOHANNES MARIA ,  KUIT JAN JAAP ,  SCHAAP PETER ,  JANSSEN JOEP ,  JASPERSE HUBRECHT BASTIAAN ,  VAN DER WEL ARJAN M

IPC: H01L21/027 ,  H01L21/68

Abstract: PROBLEM TO BE SOLVED: To solve such problems that: degraded dynamic behaviors may prolong a stable time (i.e. the desired time for bringing the position of an object table into a desired error bandwidth); larger forces are desirably provided in order to obtain the desired acceleration of a patterning device or a substrate; and the positioning accuracy of the object is affected as a result of that. SOLUTION: There is described a stage apparatus for displacing an object having a substantially flat surface. The stage apparatus is provided with an object table for supporting the object and a positioning device for displacing the object table in a first direction. The stage apparatus is further provided with a clamping device for clamping the object to the object table by a first clamping force that is controlled by an electronic control unit on the basis of the condition of the object. COPYRIGHT: (C)2007,JPO&INPIT