公开(公告)号：JP2007019031A

公开(公告)日：2007-01-25

申请号：JP2006211722

申请日：2006-08-03

Applicant: Asml Netherlands Bv ,  エーエスエムエル ネザーランズ ビー.ブイ.

Inventor： ZUKAVISHVILI GIVI GEORGIEVITCH ,  IVANOV VLADIMIR VITAL EVITCH ,  KOSHELEV KONSTANTIN NIKOLAEVIT ,  KOROB EVGENII DMITREEVITCH ,  BANINE VADIM YEVGENYEVICH ,  PAVEL STANISLAVOVICH ANTSIFERO

IPC: G21K5/00 ,  H05G2/00 ,  F28D15/02 ,  G03F7/20 ,  G21K1/00 ,  G21K5/02 ,  G21K5/08 ,  H01L21/027 ,  H05G1/02 ,  H05H1/24

CPC classification number: H05G2/003 ,  B82Y10/00 ,  F28D15/0266 ,  G03F7/70033 ,  G03F7/70166 ,  G03F7/70916 ,  H05G2/005

Abstract: PROBLEM TO BE SOLVED: To improve efficiency of conversion of electrical energy to radiation.
SOLUTION: To improve conversion efficiency of a radiation source including an anode and a cathode, the anode and the cathode being configured and arranged to create a discharge in a substance in a space between the anode and cathode and to form plasma so as to generate electromagnetic radiation, the radiation source unit is constructed to have a low inductance and to operate with a minimum of plasma. To improve heat dissipation, a fluid circulation system is created within the radiation source space and a wick by using a fluid in both its vapor and liquid phases. To prevent contamination from entering a lithographic projection apparatus, the radiation source unit is constructed to minimize the production of contamination, and a trap is employed to capture the contamination without interfering with the emitted radiation.
COPYRIGHT: (C)2007,JPO&INPIT

Abstract translation: 要解决的问题：提高电能转换到辐射的效率。 解决方案：为了提高包括阳极和阴极的辐射源的转换效率，阳极和阴极被配置和布置成在阳极和阴极之间的空间中的物质中产生放电并形成等离子体，以便 为了产生电磁辐射，辐射源单元被构造为具有低电感并且以最小的等离子体进行操作。 为了改善散热，在辐射源空间和油雾中通过在气相和液相中使用流体产生流体循环系统。 为了防止污染进入光刻投影装置，辐射源单元被构造成使污染物的产生最小化，并且使用捕集阱来捕获污染物而不干扰所发射的辐射。 版权所有（C）2007，JPO＆INPIT

公开(公告)号：JP2004165160A

公开(公告)日：2004-06-10

申请号：JP2003376283

申请日：2003-09-30

Applicant: Asml Netherlands Bv ,  エイエスエムエル ネザランドズ ベスローテン フエンノートシャップ

Inventor： ZUKAVISHVILI GIVI GEORGIEVITCH ,  IVANOV VLADIMIR VITAL EVITCH ,  KOSHELEV KONSTANTIN NIKOLAEVIT ,  KOROB EVGENII DMITREEVITCH ,  BANINE VADIM YEVGENYEVICH ,  PAVEL STANISLAVOVICH ANTSIFERO

IPC: G21K5/00 ,  F28D15/02 ,  G03F7/20 ,  G21K5/02 ,  G21K5/08 ,  H01L21/027 ,  H05G2/00 ,  H05H1/24

CPC classification number: H05G2/003 ,  B82Y10/00 ,  F28D15/0266 ,  G03F7/70033 ,  G03F7/70166 ,  G03F7/70916 ,  H05G2/005

Abstract: PROBLEM TO BE SOLVED: To provide a radiation source that improves the conversion efficiency of electric energy into radiation.
SOLUTION: A radiation source unit comprises an anode and a cathode that are configured and arranged to create discharge in a substance in a space between the anode and the cathode to form plasma so as to generate electromagnetic radiation. The liquid may comprises xenon, indium, lithium, tin, or an arbitrary suitable material. In order to improve the conversion efficiency, the radiation source unit is constructed to have low inductance and operated with the minimum of plasma. In order to improve heat dissipation, a liquid circulation system is created in the radiation source space and a wick by using a fluid in both vapor and liquid phases. In order to prevent contamination from entering a lithographic projection apparatus, the radiation source unit is constructed to minimize the generation of contamination, and a trap is employed to capture the contamination without interfering with the emitted radiation.
COPYRIGHT: (C)2004,JPO

Abstract translation: 要解决的问题：提供一种提高电能转换成辐射的转换效率的辐射源。 解决方案：辐射源单元包括阳极和阴极，其构造和布置成在阳极和阴极之间的空间中的物质中产生放电，以形成等离子体，从而产生电磁辐射。 液体可以包括氙，铟，锂，锡或任意合适的材料。 为了提高转换效率，辐射源单元被构造为具有低电感并且以最小的等离子体运行。 为了改善散热，通过在气相和液相中使用流体，在辐射源空间和芯中产生液体循环系统。 为了防止污染进入光刻投影设备，辐射源单元被构造成使污染物的产生最小化，并且采用陷阱来捕获污染物而不干扰所发射的辐射。 版权所有（C）2004，JPO

公开(公告)号：AT482607T

公开(公告)日：2010-10-15

申请号：AT05106446

申请日：2005-07-14

Applicant: ASML NETHERLANDS BV

Inventor： KOSHELEV KONSTANTIN NIKOLAEVITCH ,  IVANOV VLADIMIR VITALEVITCH ,  KOROB EVGENII DMITREEVITCH ,  ZUKAVISHVILI GIVI GEORGIEVITCH ,  GAYAZOV ROBERT RAFILEVITCH ,  KRIVTSUN VLADIMIR MIHAILOVITCH

IPC: H05G2/00

Abstract: A device for generating radiation based on a discharge includes a cathode (33k) and an anode (33a). The cathode and anode material are supplied in fluid state. The material forms a plasma pinch when the device is in use. Optionally, nozzles (31) may be used to supply the material. The cathode and/or anode may form a flat surface. The trajectories (33) of the material may be elongated. A laser (37) may be used to cause the discharge more easily. The laser may be directed on the anode or cathode or on a separate material located in between the anode and cathode.

公开(公告)号：DE602005023696D1

公开(公告)日：2010-11-04

申请号：DE602005023696

申请日：2005-07-14

Applicant: ASML NETHERLANDS BV

Inventor： KOSHELEV KONSTANTIN NIKOLAEVITCH ,  IVANOV VLADIMIR VITALEVITCH ,  KOROB EVGENII DMITREEVITCH ,  ZUKAVISHVILI GIVI GEORGIEVITCH ,  GAYAZOV ROBERT RAFILEVITCH ,  KRIVTSUN VLADIMIR MIHAILOVITCH

IPC: H05G2/00

公开(公告)号：SG127702A1

公开(公告)日：2006-12-29

申请号：SG200305749

申请日：2003-09-30

Applicant: ASML NETHERLANDS BV

Inventor： ZUKAVISHVILI GIVI GEORGIEVITCH ,  IVANOV VLADIMIR VITALEVITCH ,  KOSHELEV KONSTANTIN NIKOLAEVIT ,  KOROB EVGENII DMITREEVITCH ,  BANINE VADIM YEVGENYEVICH ,  ANTSIFEROV PAVEL STANISLAVOVIC

IPC: G21K5/00 ,  F28D15/00 ,  F28D15/02 ,  G03F7/00 ,  G03F7/20 ,  G21K5/02 ,  G21K5/08 ,  H01L21/027 ,  H05G2/00 ,  H05H1/24

Abstract: A radiation source unit is provided that includes an anode and a cathode that are configured and arranged to create a discharge in a substance in a space between said anode and cathode and to form a plasma so as to generate electromagnetic radiation. The substance may comprise xenon, indium, lithium, tin or any suitable material. To improve conversion efficiency, the source unit may be constructed to have a low inductance, and operated with a minimum of plasma. To, for example, improve heat dissipation, a fluid circulation system can be created within the source volume and a wick by using a fluid in both its vapor and liquid states. To, for example, prevent contamination from entering a lithographic projection apparatus, the source unit can be constructed to minimize the production of contamination, and a trap can be employed to capture the contamination without interfering with the emitted radiation.