公开(公告)号：DE60139532D1

公开(公告)日：2009-09-24

申请号：DE60139532

申请日：2001-06-29

Applicant: ASML NETHERLANDS BV

Inventor： KOSHELEV KONSTANTIN NIKOLAEVITCH ,  BIJKERK FREDERIK ,  ZUKAVISHVILI GIVI GEORGIEVITCH ,  KOROP EVGENII DMITREEVITCH ,  IVANOV VLADIMIR VITAL EVITCH

IPC: G21K5/02 ,  H05G2/00 ,  G03F7/20 ,  H01L21/027 ,  H05H1/24

Abstract: A radiation source comprises an anode and a cathode for creating a discharge in a gas or vapor in a space between anode and cathode and to form a plasma of a working gas or vapor so as to generate electromagnetic radiation. The cathode comprises a hollow cavity having an aperture that has a substantially annular configuration around a central axis of said radiation source for initiating the discharge. A driver gas or vapor is supplied to the cathode cavity and the working gas or vapor is supplied in a region around the central axis in between anode and cathode. The working gas or vapor may comprise xenon, lithium vapor and tin vapor.