公开(公告)号：JP2007329484A

公开(公告)日：2007-12-20

申请号：JP2007155698

申请日：2007-06-12

Applicant: Asml Netherlands Bv ,  エーエスエムエル ネザーランズ ビー.ブイ.

Inventor： FIEDOROWICZ HENRYK ,  BIJKERK FREDERIK ,  DE BRUIJN CORNELIS C ,  BARTNIK ANDRZEJ ,  KOSHELEV KONSTANTIN NIKOLAEVIT ,  BANINE VADIM YEVGENYEVICH

IPC: G21K5/00 ,  H01L21/027 ,  B01J19/08 ,  G03F7/20 ,  G21K5/08 ,  H05G2/00 ,  H05H1/06 ,  H05H1/24

CPC classification number: H05G2/003 ,  G03F7/70033

Abstract: PROBLEM TO BE SOLVED: To provide an improved plasma source that can be used as a radiation source for a lithographic projection apparatus and emits extreme ultraviolet radiations (EUV). SOLUTION: A radiation source 220 of a radiation system of a lithographic projection apparatus comprises electrodes 221 and 222 generating an electric discharge between them in such a manner that the electric discharge collapses into a pinch volume 229. The collapsing electric discharge generates a high-temperature plasma that is highly ionized in the pinch volume. The working fluid of a supply source 227 is ejected into the pinch volume from an injection nozzle. Thereby, it is raised up to the high-temperature state, and far ultraviolet rays PB are emitted. COPYRIGHT: (C)2008,JPO&INPIT

Abstract translation: 要解决的问题：提供可用作光刻投影设备的辐射源并发射极紫外辐射（EUV）的改进的等离子体源。 解决方案：光刻投影设备的辐射系统的辐射源220包括电极221和222，它们以这样的方式产生它们之间的放电，使得放电塌陷成压缩体积229.塌陷放电产生 在压缩体积中高度电离的高温等离子体。 供应源227的工作流体从喷嘴喷射到压缩容积中。 由此，升高到高温状态，发出远紫外线PB。 版权所有（C）2008，JPO＆INPIT

公开(公告)号：DE60043381D1

公开(公告)日：2010-01-07

申请号：DE60043381

申请日：2000-12-14

Applicant: ASML NETHERLANDS BV

Inventor： FIEDOROWICZ HENRYK ,  BIJKERK FREDERIK ,  DE BRUIJN CORNELIS CORNELIA ,  BARTNIK ANDRZEJ ,  KOSHELEV KONSTANTIN NIKOLAEVITCH ,  BANINE VADIM YEVGENYEVITCH

IPC: H01L21/027 ,  H05G2/00 ,  G03F7/20

Abstract: A radiation source of a radiation system of a lithographic projection apparatus comprises electrodes for creating a discharge in a space between them such that the discharge collapses into a pinch volume. The collapsing discharge creates a highly ionized, high temperature plasma in the pinch volume. A working fluid is ejected from a jet nozzle into the pinching volume and is thereby raised to a high temperature state and emits extreme ultraviolet radiation.

公开(公告)号：DE60139532D1

公开(公告)日：2009-09-24

申请号：DE60139532

申请日：2001-06-29

Applicant: ASML NETHERLANDS BV

Inventor： KOSHELEV KONSTANTIN NIKOLAEVITCH ,  BIJKERK FREDERIK ,  ZUKAVISHVILI GIVI GEORGIEVITCH ,  KOROP EVGENII DMITREEVITCH ,  IVANOV VLADIMIR VITAL EVITCH

IPC: G21K5/02 ,  H05G2/00 ,  G03F7/20 ,  H01L21/027 ,  H05H1/24

Abstract: A radiation source comprises an anode and a cathode for creating a discharge in a gas or vapor in a space between anode and cathode and to form a plasma of a working gas or vapor so as to generate electromagnetic radiation. The cathode comprises a hollow cavity having an aperture that has a substantially annular configuration around a central axis of said radiation source for initiating the discharge. A driver gas or vapor is supplied to the cathode cavity and the working gas or vapor is supplied in a region around the central axis in between anode and cathode. The working gas or vapor may comprise xenon, lithium vapor and tin vapor.