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公开(公告)号：KR20200133740A
公开(公告)日：2020-11-30
申请号：KR20207026497
申请日：2019-03-20
Applicant: ASML NETHERLANDS BV
Inventor： LANGLOIS MARC GUY , LANSBERGEN ROBERT GABRIEL MARIA , LEENDERS MARTINUS HENDRIKUS ANTONIUS , TEGENBOSCH HENRICUS GERARDUS
IPC: H05G2/00
Abstract: 타겟재료부스러기를액체형태로축적하는수단을포함하는 EUV 시스템이개시되며, 타겟재료는광학기구상으로튀는것이차단되고, 타겟재료는고화될수 있고, 그런다음에, 융용되어콜렉터를오염시킴이없이배출될수 있는위치로전달된다.
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