公开(公告)号：NL1036794A1

公开(公告)日：2009-10-27

申请号：NL1036794

申请日：2009-03-31

Applicant: ASML NETHERLANDS BV ,  ASML HOLDING NV

Inventor： LANSBERGEN ROBERT GABRIEL MARI ,  HARROLD GEORGE HILARY ,  DOREN MATTHEW JAMES VAN

IPC: G03F7/20 ,  G03F9/00 ,  H01L21/68

公开(公告)号：SG106129A1

公开(公告)日：2004-09-30

申请号：SG200300824

申请日：2003-02-27

Applicant: ASML NETHERLANDS BV

Inventor： HEERENS GERT-JAN ,  VAN DE VEN BASTIAAN LAMBERTUS ,  LANSBERGEN ROBERT GABRIEL MARI ,  HAM ERIK LEONARDUS

IPC: G03F1/66 ,  G03F7/20 ,  H01L21/027 ,  H01L21/673 ,  H01L21/677

Abstract: A method for transferring one or more substrates or masks in a storage box to an apparatus for handling, processing or using the substrates or masks or vice versa, the storage box including a cover having an openable cover part. The method includes providing the storage box onto an openable wall part of a wall of an enclosed protective environment of the apparatus such that the openable cover part overlaps the openable wall part, the protective environment being adapted to be filled with an inert gas or to be evacuated; opening the openable cover part and the openable wall part, whereby the cover of the storage box forms part of the wall of the protective environment and an inside of the storage box becomes part of the protective environment; and transferring at least one of the substrates or masks from an inside space of the storage box to an inside space of the protective environment, or vice versa.

公开(公告)号：SG109002A1

公开(公告)日：2005-02-28

申请号：SG200404373

申请日：2004-07-19

Applicant: ASML NETHERLANDS BV

Inventor： VAN DE VEN BASTIAAN LAMBERTUS ,  HEERENS GERTJAN ,  LANSBERGEN ROBERT GABRIEL MARI ,  LEENDERS MARTINUS HENDRIKUS AN ,  LOOPSTRA ERIK ROELOF

IPC: G03F7/20 ,  H01L21/00 ,  H01L21/027