Patent search ap:("ASML NETHERLANDS BV") AND inv:"LOOPSTRA JOHANNES" Page 1

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发明专利
Radiation system, radiation collector, radiation beam conditioning system, spectral purity filter for a radiation system and method of forming a spectral purity filter. 未知

公开(公告)号：NL2002838A1

公开(公告)日：2009-12-01

申请号：NL2002838

申请日：2009-05-05

Applicant: ASML NETHERLANDS BV

Inventor： BANINE VADIM , BOEIJ WILHELMUS DE , LOOPSTRA JOHANNES , SWINKELS GERARDUS , DIJSSELDONK ANTONIUS VAN , SCHOOT JAN VAN

IPC: H05G2/00 , G03F7/20

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