Patent search ap:("ASML NETHERLANDS BV") AND inv:"NUNEN GERARDUS PETRUS MATTHIJS" Page 1

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发明专利
Method of placing a substrate, method of transferring a substrate, support system and lithographic projection apparatus. 未知

公开(公告)号：NL1036040A1

公开(公告)日：2009-04-15

申请号：NL1036040

申请日：2008-10-09

Applicant: ASML NETHERLANDS BV

Inventor： ALBERTI JOZEF AUGUSTINUS MARIA , NUNEN GERARDUS PETRUS MATTHIJS , GROENSMIT FRANS ERIK , COMPEN RENE THEODORUS PETRUS , SOETHOUDT ABRAHAM ALEXANDER

IPC: H01L21/68 , G03F7/20 , G03F9/00

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