公开(公告)号：JP2009302536A

公开(公告)日：2009-12-24

申请号：JP2009135672

申请日：2009-06-05

Applicant: Asml Netherlands Bv ,  エーエスエムエル ネザーランズ ビー.ブイ.

Inventor： LOOPSTRA ERIK ROELOF ,  BARTRAY PETRUS RUTGERUS ,  LEVASIER LEON MARTIN ,  LUTTIKHUIS BERNARDUS ANTONIUS ,  SMITS JOSEPHUS JACOBUS ,  AANTJES ANTHONIE ,  WIJCKMANS MAURICE WILLEM JOZEF ,  RIDDER JOHANNES BERNARDUS ,  SCHREUDER ANDRE ,  PAULUSSEN DENNIS JOZEF MARIA ,  JONKERS PETER GERARDUS ,  POINCELIN HUGUES ,  HEUSSCHEN FRANSISCUS THERESIA

IPC: H01L21/027 ,  G03F7/20

CPC classification number: G03F7/709 ,  G03F7/70808

Abstract: PROBLEM TO BE SOLVED: To suppress transmission of undesirable vibrations with respect to a lithography device and a device manufacturing method. SOLUTION: The lithography device includes a projection system configured to project an image on a substrate, a substrate table configured to support the substrate, a first chamber including the projection system, and a second chamber including the substrate table and first frame. The device includes a base frame configured so as to support the second chamber and an intermediate frame coupled to the base frame. The intermediate frame is configured to separate the first chamber and the second chamber. The device includes a support coupled to the first frame. The support is configured to support the first chamber through coupled openings that the intermediate frame and second chamber have. COPYRIGHT: (C)2010,JPO&INPIT

Abstract translation: 要解决的问题：抑制相对于光刻设备的不期望的振动的传输和装置制造方法。 光刻设备包括：投影系统，被配置为将图像投影在基板上;衬底台，其被配置为支撑所述基板;第一室，包括所述投影系统;以及第二室，包括所述基板台和所述第一框架。 该装置包括被配置为支撑第二室的基座框架和耦合到基架的中间框架。 中间框架构造成分离第一室和第二室。 该装置包括联接到第一框架的支撑件。 支撑构造成通过中间框架和第二室具有的联接开口支撑第一室。 版权所有（C）2010，JPO＆INPIT

公开(公告)号：NL1036957A1

公开(公告)日：2009-12-15

申请号：NL1036957

申请日：2009-05-13

Applicant: ASML NETHERLANDS BV

Inventor： LOOPSTRA ERIK ROELOF ,  BARTRAY PETRUS RUTGERUS ,  LEVASIER LEON MARTIN ,  LUTTIKHUIS BERNARDUS ANTONIUS ,  SMITS JOSEPHUS JACOBUS ,  AANTJES ANTHONIE ,  WIJCKMANS MAURICE WILLEM JOZEF ,  RIDDER JOHANNES BERNARDUS ,  SCHREUDER ANDRE ,  PAULUSSEN DENNIS JOSEF MARIA ,  JONKERS PETER GERARDUS ,  POINCELIN HUGUES ,  HEUSSCHEN FRANSISCUS THERESIA

IPC: G03F7/20