Patent search ap:("ASML NETHERLANDS BV") AND inv:"SPIERDIJK JOHANNUS PETRUS FRANSISCUS" Page 1

1.

发明专利
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD. 未知

公开(公告)号：NL2006257A

公开(公告)日：2011-08-24

申请号：NL2006257

申请日：2011-02-18

Applicant: ASML NETHERLANDS BV

Inventor： ZWET ERWIN , JAGER PIETER , ONVLEE JOHANNES , FRITZ ERIK , DEKKER ALBERT , SPIERDIJK JOHANNUS PETRUS FRANSISCUS , MAN HENDRIK

IPC: G03F7/20

Patent Agency Ranking