Patent search ap:("ASML NETHERLANDS BV") AND inv:"VAINIR YURI" Page 1

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发明专利
METHODS AND APPARATUS FOR INSPECTION OF ARTICLES, EUV LITHOGRAPHY RETICLES, LITHOGRAPHY APPARATUS AND METHOD OF MANUFACTURING DEVICES. 未知

公开(公告)号：NL2006692A

公开(公告)日：2011-06-09

申请号：NL2006692

申请日：2011-04-29

Applicant: ASML NETHERLANDS BV

Inventor： VAINIR YURI , BANINE VADIM , BOEF ARIE , SCACCABAROZZI LUIGI

IPC: G03F7/20 , H01L21/66

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