公开(公告)号：WO2014154428A3

公开(公告)日：2014-12-18

申请号：PCT/EP2014053700

申请日：2014-02-26

Applicant: ASML NETHERLANDS BV

Inventor： LAFARRE RAYMOND ,  ACHANTA SATISH ,  FILIPPI MATTEO ,  KARADE YOGESH ,  NELLISSEN ANTONIUS ,  VAN DER WILK RONALD ,  VAN DOREMALEN HENDRIKUS CHRISTOFFEL MARIA ,  WELTERS WILHELMUS

IPC: G03F7/20

CPC classification number: G03F7/70716 ,  G03F7/70708

Abstract: A method of manufacturing an object holder (100) for use in a lithographic apparatus, the object holder comprising one or more electrically functional components, the method comprising: using a composite structure comprising a carrier sheet (20) different from a main body (100a) of the object holder and a layered structure comprising one or a plurality of layers (22) and formed on the carrier sheet; connecting the composite structure to a surface of the main body such that the layered structure is between the carrier sheet and the surface of the main body; and removing the carrier sheet from the composite structure, leaving the layered structure connected to the main body.

Abstract translation: 一种制造用于光刻设备的物体保持器（100）的方法，所述物体保持器包括一个或多个电功能部件，所述方法包括：使用复合结构，所述复合结构包括不同于主体（100a）的载体片 ）和包括一个或多个层（22）并形成在所述载体片上的层状结构; 将复合结构连接到主体的表面，使得层状结构位于载体片和主体的表面之间; 并从复合结构中移除载体片，使分层结构连接到主体。