公开(公告)号：WO2014154428A3

公开(公告)日：2014-12-18

申请号：PCT/EP2014053700

申请日：2014-02-26

Applicant: ASML NETHERLANDS BV

Inventor： LAFARRE RAYMOND ,  ACHANTA SATISH ,  FILIPPI MATTEO ,  KARADE YOGESH ,  NELLISSEN ANTONIUS ,  VAN DER WILK RONALD ,  VAN DOREMALEN HENDRIKUS CHRISTOFFEL MARIA ,  WELTERS WILHELMUS

IPC: G03F7/20

CPC classification number: G03F7/70716 ,  G03F7/70708

Abstract: A method of manufacturing an object holder (100) for use in a lithographic apparatus, the object holder comprising one or more electrically functional components, the method comprising: using a composite structure comprising a carrier sheet (20) different from a main body (100a) of the object holder and a layered structure comprising one or a plurality of layers (22) and formed on the carrier sheet; connecting the composite structure to a surface of the main body such that the layered structure is between the carrier sheet and the surface of the main body; and removing the carrier sheet from the composite structure, leaving the layered structure connected to the main body.

Abstract translation: 一种制造用于光刻设备的物体保持器（100）的方法，所述物体保持器包括一个或多个电功能部件，所述方法包括：使用复合结构，所述复合结构包括不同于主体（100a）的载体片 ）和包括一个或多个层（22）并形成在所述载体片上的层状结构; 将复合结构连接到主体的表面，使得层状结构位于载体片和主体的表面之间; 并从复合结构中移除载体片，使分层结构连接到主体。

公开(公告)号：WO2014122151A3

公开(公告)日：2014-11-20

申请号：PCT/EP2014052204

申请日：2014-02-05

Applicant: ASML HOLDING NV ,  ASML NETHERLANDS BV

Inventor： DELPUERTO SANTIAGO E ,  LIPSON MATTHEW ,  HENDERSON KENNETH ,  LAFARRE RAYMOND ,  MARKOYA LOUIS JOHN ,  UITTERDIJK TAMMO ,  VERMEULEN JOHANNES PETRUS MARTINUS BERNARDUS ,  DE GROOT ANTONIUS FRANCISCUS JOHANNES ,  VAN DER WILK RONALD

IPC: G03F7/20

CPC classification number: G03F7/70875 ,  G03F7/70708 ,  H01L21/67109 ,  H01L21/6831 ,  H01L21/6875

Abstract: A support such as a clamp (310) is configured to releasably hold a patterning device such as a reticle (300) to secure it and prevent heat-induced deformation of it. For example, an electrostatic clamp includes a first substrate (312) having opposing first (313) and second (315) surfaces, a plurality of burls (316) located on the first surface and configured to contact the reticle, a second substrate (314) having opposing first (317) and second (319) surfaces. The first surface of the second substrate is coupled to the second surface of the first substrate. A plurality of cooling elements (318) are located between the first surface of the second substrate and the second surface of the first substrate. The cooling elements are configured to cause electrons to travel from the second surface of the first substrate to the first surface of the second substrate. Each cooling element is substantially aligned with a respective burl.

Abstract translation: 诸如夹具（310）的支撑件构造成可释放地保持诸如掩模版（300）的图案形成装置以将其固定并防止其热引起的变形。 例如，静电夹具包括具有相对的第一（313）和第二（315）表面的第一基底（312），位于第一表面上并被构造成接触光罩的多个毛刺（316），第二基底 ）具有相对的第一（317）和第二（319）表面。 第二衬底的第一表面耦合到第一衬底的第二表面。 多个冷却元件（318）位于第二基板的第一表面和第一基板的第二表面之间。 冷却元件构造成使电子从第一衬底的第二表面移动到第二衬底的第一表面。 每个冷却元件基本上与相应的毛刺对齐。