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公开(公告)号：NL2007630A
公开(公告)日：2011-11-23
申请号：NL2007630
申请日：2011-10-20
Applicant: ASML NETHERLANDS BV
Inventor： SCACCABAROZZI LUIGI , BANINE VADIM , LUTTIKHUIS BERNARDUS , KOOLE ROELOF , WONDERGEM HENDRIKUS , GRAAT PETRUS
IPC: G03F7/20
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