公开(公告)号：WO2011000671A1

公开(公告)日：2011-01-06

申请号：PCT/EP2010/058021

申请日：2010-06-08

Applicant: ASML Netherlands B.V. ,  BUIS, Edwin ,  DE VRIES, Gosse

Inventor： BUIS, Edwin ,  DE VRIES, Gosse

IPC: G02B26/08 ,  G02B7/182 ,  G03F7/20

CPC classification number: G03F7/702 ,  G02B26/12 ,  G03F7/70075 ,  G03F7/70091

Abstract: An array of reflective elements is disclosed, at least one of the reflective elements being mounted on a mounting which comprises a rod at least partially located within a sleeve. A first end of the rod is fixed to a first end of the sleeve and a second end of the rod is moveable, the sleeve including a first resiliently flexible portion which is configured to bend in order to allow the movement of the second end of the rod to take place, wherein the reflective element is mounted at the first end of the sleeve such that bending of the sleeve causes rotation of the reflective element.

Abstract translation: 公开了一组反射元件，所述反射元件中的至少一个安装在包括至少部分地位于套筒内的杆的安装件上。 杆的第一端固定到套筒的第一端并且杆的第二端是可移动的，套筒包括第一弹性柔性部分，其被配置为弯曲以允许第二端部的运动 杆，其中反射元件安装在套筒的第一端，使得套筒的弯曲导致反射元件的旋转。

公开(公告)号：WO2014060170A1

公开(公告)日：2014-04-24

申请号：PCT/EP2013/069301

申请日：2013-09-17

Applicant: ASML NETHERLANDS B.V.

Inventor： VAN SCHOOT, Jan ,  HOL, Sven ,  BUIS, Edwin ,  REKKERS, Erik ,  DE VRIES, Gosse ,  BOTMA, Hako ,  VAN DAM, Marinus ,  VAN GORKOM, Ramon

IPC: G03F7/20 ,  G02B7/182 ,  G02B26/08

CPC classification number: G03F7/70091 ,  G01C9/06 ,  G01C2009/066 ,  G02B7/1821 ,  G03F7/70116 ,  H01F7/0231 ,  H01F7/206 ,  H01H2051/2218 ,  H02K41/00

Abstract: An actuator (300) to displace, for example a mirror, provides movement with at least two degrees of freedom by varying the currents in two electromagnets (370, 372, 376, 378). A moving part includes a permanent magnet (362) with a magnetic face constrained to move over a working area lying substantially in a first plane perpendicular to a direction of magnetization of the magnet. The electromagnets have pole faces (380, 382) lying substantially in a second plane closely parallel to the first plane, each pole face substantially filling a quadrant of the area traversed by the face of the moving magnet. An optical position sensor (390) may direct a beam of radiation (398) at the moving magnet through a central space between the electromagnets. The sizes of facets in a pupil mirror device may be made smaller in a peripheral region, but larger in a central region, thereby relaxing focusing requirements.

Abstract translation: 用于移位例如反射镜的致动器（300）通过改变两个电磁体（370,372,376,378）中的电流来提供具有至少两个自由度的运动。 移动部件包括永磁体（362），其具有被限制在基本垂直于磁体的磁化方向的第一平面中的工作区域上移动的磁性面。 电磁体具有基本上位于与第一平面紧密平行的第二平面中的极面（380,382），每个极面基本上填充由移动磁体的表面穿过的区域的象限。 光学位置传感器（390）可以通过电磁体之间的中心空间来引导移动磁体处的辐射束（398）。 瞳孔镜装置中的小平面的尺寸可以在外围区域中较小，但在中心区域较大，从而放松聚焦要求。

公开(公告)号：WO2011023419A1

公开(公告)日：2011-03-03

申请号：PCT/EP2010/053539

申请日：2010-03-18

Applicant: ASML Netherlands B.V. ,  DE VRIES, Gosse ,  BUIS, Edwin ,  VAN DAM, Marinus ,  VAN SCHOOT, Jan ,  BOON, Fidelus ,  KREUWEL, Hermanus

Inventor： DE VRIES, Gosse ,  BUIS, Edwin ,  VAN DAM, Marinus ,  VAN SCHOOT, Jan ,  BOON, Fidelus ,  KREUWEL, Hermanus

IPC: G03F7/20

CPC classification number: G03F7/70116 ,  G03F7/70075

Abstract: An illumination system is disclosed that has a plurality of moveable reflective elements (22a, 22b, 22c) and associated actuators which may be configured to form an illumination mode. One or more of the actuators is arranged to move between first, second and third positions, and so move an associated moveable reflective element (22a, 22b, 22c) between first, second and third orientations, the first and second orientations being such that radiation reflected from the moveable reflective element (22a, 22b, 22c) forms part of the illumination mode, and the third orientation being such that radiation reflected from the moveable reflective element does not form part of the illumination mode.

Abstract translation: 公开了一种具有多个可移动反射元件（22a，22b，22c）和相关联的致动器的照明系统，其可以被配置为形成照明模式。 一个或多个致动器布置成在第一，第二和第三位置之间移动，并且因此在第一，第二和第三取向之间移动相关联的可移动反射元件（22a，22b，22c），第一和第二取向使得辐射 从可动反射元件（22a，22b，22c）反射形成照明模式的一部分，并且第三取向使得从可移动反射元件反射的辐射不会形成照明模式的一部分。

公开(公告)号：WO2014060169A1

公开(公告)日：2014-04-24

申请号：PCT/EP2013/069299

申请日：2013-09-17

Applicant: ASML NETHERLANDS B.V.

Inventor： BUIS, Edwin ,  DE VRIES, Gosse ,  HOL, Sven ,  REKKERS, Erik

IPC: G03F7/20

CPC classification number: G03F7/70833 ,  G02B5/0891 ,  G02B7/1828 ,  G02B19/0023 ,  G02B26/0816 ,  G03F7/70116 ,  G03F7/7015 ,  G03F7/70825 ,  H01F7/0205 ,  H02K11/40 ,  H02K16/00 ,  H02K41/0352 ,  H02K41/0356 ,  H02K49/10

Abstract: An EUV optical apparatus includes a number of adjustable mirrors (22x) on mirror bodies (120). Each mirror body is supported on an actuator (l00x) comprising a moving part (132, 134, 136) and a fixed casing part (128, 130). The actuator provides a resilient support (140, 142) for the mirror body so that it is tiltable with two degrees relative to the casing. An electromagnetic motor (166, 170-178) applies first part, under the influence of an applied motive force, the resilient mounting being arranged to provide a biasing force that resists said motive force. A magnetic coupling (102, 104a, 104b) is arranged between the moving and fixed parts so as to provide a counter-biasing force. The counter-biasing force partly opposes said biasing force and thereby reduces the motive force required to effect a given displacement. The actuator can thus be made with reduced size, weight and heat dissipation.

Abstract translation: EUV光学装置包括在镜体（120）上的多个可调镜（22x）。 每个镜体支撑在包括移动部件（132,134,136）和固定壳体部件（128,130）的致动器（100x）上。 致动器提供用于镜体的弹性支撑件（140,142），使得其相对于壳体可倾斜两度。 电磁马达（166,170-178）在施加的动力的作用下施加第一部分，所述弹性安装件设置成提供抵抗所述动力的偏置力。 磁性联轴器（102,104a，104b）设置在运动部件和固定部件之间，以提供反作用力。 反作用力部分地与所述偏压力相反，从而减小了实现给定位移所需的动力。 致动器因此可以减小尺寸，重量和散热。

公开(公告)号：WO2011023423A1

公开(公告)日：2011-03-03

申请号：PCT/EP2010/054687

申请日：2010-04-09

Applicant: ASML NETHERLANDS B.V. ,  BUIS, Edwin ,  DE VRIES, Gosse ,  BOON, Fidelus

Inventor： BUIS, Edwin ,  DE VRIES, Gosse ,  BOON, Fidelus

IPC: G03F7/20

CPC classification number: G03F7/70116 ,  G02B7/1821

Abstract: An optical apparatus having a moveable reflective element (110) and associated actuator (109) is disclosed. The actuator comprises a first magnet (113) which is connected to the moveable reflective element such that movement of the first magnet will cause the moveable ref lectiveelement to move, and a second magnet (114) which is connected to a motor (116) such that operation of the motor will cause the second magnet to move, wherein the second magnet is positioned relative to the first magnet such that moving the second magnet will cause the first magnet to move.

Abstract translation: 公开了一种具有可移动反射元件（110）和相关致动器（109）的光学设备。 所述致动器包括连接到所述可移动反射元件的第一磁体（113），使得所述第一磁体的移动将导致所述可移动的取出元件移动;以及第二磁体（114），其连接到所述电动机（116） 电动机的操作将导致第二磁体移动，其中第二磁体相对于第一磁体定位，使得移动第二磁体将导致第一磁体移动。

公开(公告)号：WO2010066515A1

公开(公告)日：2010-06-17

申请号：PCT/EP2009/064605

申请日：2009-11-04

Applicant: ASML NETHERLANDS B.V. ,  DE VRIES, Gosse ,  BUIS, Edwin ,  MICKAN, Uwe

Inventor： DE VRIES, Gosse ,  BUIS, Edwin ,  MICKAN, Uwe

IPC: G03F7/20 ,  F03G7/06

CPC classification number: G03F7/70825 ,  G03F7/70141

Abstract: An actuator system is provided that is configured to move a component relative to a base of the actuator system. The actuator system includes first and second actuating elements, each comprising two sections of material that are joined to each other and have different coefficients of thermal expansion. The two actuating elements are configured such that if the temperature of one is increased it applies a force on the component in a direction that is opposite to the force applied by the other actuating element if its temperature is increased. The actuator system further includes at least one power supply configured to provide independently controllable heating to the first and second actuating elements.

Abstract translation: 提供致动器系统，其构造成相对于致动器系统的基座移动部件。 致动器系统包括第一和第二致动元件，每个致动元件包括彼此连接并具有不同热膨胀系数的两部分材料。 两个致动元件被构造成使得如果一个温度升高，则如果其温度升高，则其在与另一个致动元件施加的力相反的方向上对部件施加力。 致动器系统还包括被配置为向第一和第二致动元件提供独立可控加热的至少一个电源。

公开(公告)号：EP2906994A1

公开(公告)日：2015-08-19

申请号：EP13770854.1

申请日：2013-09-17

Applicant: ASML Netherlands B.V.

Inventor： VAN SCHOOT, Jan ,  HOL, Sven ,  BUIS, Edwin ,  REKKERS, Erik ,  DE VRIES, Gosse ,  BOTMA, Hako ,  VAN DAM, Marinus ,  VAN GORKOM, Ramon

IPC: G03F7/20 ,  G02B7/182 ,  G02B26/08

Abstract: An actuator to displace, for example a mirror, provides movement with at least two degrees of freedom by varying the currents in two electromagnets. A moving part includes a permanent magnet with a magnetic face constrained to move over a working area lying substantially in a first plane perpendicular to a direction of magnetization of the magnet. The electromagnets have pole faces lying substantially in a second plane closely parallel to the first plane, each pole face substantially filling a quadrant of the area traversed by the face of the moving magnet. An optical position sensor may direct a beam of radiation at the moving magnet through a central space between the electromagnets. The sizes of facets in a pupil mirror device may be made smaller in a peripheral region, but larger in a central region, thereby relaxing focusing requirements.

Abstract translation: 的致动器以替换，对于实施例的反射镜，通过在两个电磁体不同的电流提供具有至少两个自由度的运动。 移动部分包括具有约束移动超过在第一基本上位于同一平面的工作区域的磁面的永久磁铁在垂直于磁体的磁化方向。 电磁铁具有极面在第二平面中基本上位于密切平行于所述第一平面中，每个极面基本上填充通过移动磁铁的面横穿的区域的一个象限。 光学位置传感器可以通过电磁体之间的中央空间直接在移动磁体的辐射束。 在光瞳反射镜装置刻面的尺寸可以在中央区域制成在外围区域中较小，但较大的，从而缓和聚焦的要求。

公开(公告)号：EP2906994B1

公开(公告)日：2020-03-25

申请号：EP13770854.1

申请日：2013-09-17

Applicant: ASML Netherlands B.V.

Inventor： VAN SCHOOT, Jan ,  HOL, Sven ,  BUIS, Edwin ,  REKKERS, Erik ,  DE VRIES, Gosse ,  BOTMA, Hako ,  VAN DAM, Marinus ,  VAN GORKOM, Ramon

IPC: G03F7/20 ,  G02B7/182 ,  G02B26/08