公开(公告)号：SG124233A1

公开(公告)日：2006-08-30

申请号：SG200006871

申请日：2000-11-28

Applicant: AXCELIS TECH INC

Inventor： MCINTYRE EDWARD KIRBY JR ,  ALLEN ERNEST EVERETT JR ,  JONES MARY ALICE ,  NAKATSUGAWA TOMOYA

IPC: C23C14/48 ,  H01J37/00 ,  H01J37/09 ,  H01J37/317 ,  H01L21/265

Abstract: A component of an ion implanter (10), and a method of operating same, are provided for reducing the amount of x-rays generated when an ion beam (15) passes there through. In one embodiment, the component comprises an electrode (72) in an ion implanter radio frequency (RF) linear accelerator (linac) (18) that is coated with a material coating (114) having as lesser atomic mass that that of the underlying electrode, such that electrons impacting said coating produce less x-rays than electrons impacting said electrode. The electrode (72) may be made of aluminum, and the coating (114) may be made of a carbon- based material, such as a synthetic diamond or a diamond-like coating (DLC) material. The coating (114) has a thickness of approximately two to ten (2-10) microns ([err]m), and is applied by a chemical vapor deposition (CVD) process.