公开(公告)号：WO2017034758A1

公开(公告)日：2017-03-02

申请号：PCT/US2016/044762

申请日：2016-07-29

Applicant: AXCELIS TECHNOLOGIES, INC.

Inventor： BAGGET, John ,  BERINGER, Jason

IPC: H01J37/08

CPC classification number: H01J37/08 ,  H01J3/04 ,  H01J2237/061 ,  H01J2237/31701

Abstract: An ion source filament clamp (100) has a clamp member (102) having first (104) and second ends (106). The first end has one of a cam surface (132) and a cam follower (134), and has first (110) and second (112) portions that are opposed to one another and separated by a slot (114) having a lead opening (116) defined therein to receive a lead of an ion source filament. An actuator pin (120) extends along an actuator pin axis (126) and has first (122) and second sections. The first section (122) is coupled to the first portion (110) of the clamp member. The actuator pin extends through, and is in sliding engagement with, a thru-hole (128) in the second portion of the clamp member. A cam member (108) is operably coupled to the second section (124) of the actuator pin (120). The cam member has a handle (130) and the other of the cam surface (132) and cam follower (134) and is configured to rotate between a clamped position and an undamped position. The cam follower (134) slidingly contacts the cam surface (132). In the clamped position, the cam follower engages the cam surface in a first predetermined manner, thus selectively compressing the first and second portions (110,112) of the clamp member toward one another and exerting a clamping pressure on the lead within the lead opening (116) while inducing a spring tension between the first and second portions of the clamp member. In the undamped position, the cam follower engages the cam surface in a second predetermined manner, wherein the spring tension extends the first and second portions (110,112) of the clamp member apart from one another, therein releasing the clamping pressure on the lead within the lead opening.

Abstract translation: 离子源灯丝夹具（100）具有具有第一（104）和第二端（106）的夹紧构件（102）。 第一端具有凸轮表面（132）和凸轮从动件（134）中的一个，并且具有第一（110）和第二（112）部分，其彼此相对并且由具有引导开口的槽（114）分隔开 （116），以接收离子源灯丝的引线。 致动器销（120）沿着致动器销轴线（126）延伸并且具有第一（122）和第二部分。 第一部分（122）联接到夹紧构件的第一部分（110）。 致动器销延伸穿过夹紧构件的第二部分中的通孔（128）并与其滑动接合。 凸轮构件（108）可操作地联接到致动器销（120）的第二部分（124）。 凸轮构件具有手柄（130）和凸轮表面（132）和凸轮从动件（134）中的另一个，并且构造成在夹紧位置和无阻尼位置之间旋转。 凸轮从动件（134）滑动地接触凸轮表面（132）。 在夹紧位置，凸轮从动件以第一预定方式接合凸轮表面，从而选择性地将夹紧构件的第一和第二部分（110,112）压向彼此并且在引线开口（116）内的引线上施加夹紧压力 ），同时在夹紧构件的第一和第二部分之间引起弹簧张力。 在无阻尼位置中，凸轮从动件以第二预定方式接合凸轮表面，其中弹簧张力使夹紧构件的第一和第二部分（110,112）彼此分开延伸，从而将夹紧压力释放在引线内 铅开