公开(公告)号：WO2013188519A1

公开(公告)日：2013-12-19

申请号：PCT/US2013/045374

申请日：2013-06-12

Applicant: AXCELIS TECHNOLOGIES, INC. ,  LEE, William Davis ,  HOYT, Kevin ,  SHANNER, David ,  BERINGER, Jason

Inventor： LEE, William Davis ,  HOYT, Kevin ,  SHANNER, David ,  BERINGER, Jason

IPC: H01L21/673 ,  H01L21/687

CPC classification number: H01L21/67346 ,  H01L21/68721

Abstract: A workpiece carrier comprises a first plate having a first outer diameter, a first inner diameter, and a first recess extending a first distance from the first inner diameter toward the first outer diameter. The workpiece carrier further comprises a second plate having a second outer diameter, a second inner diameter, and a second recess extending a second distance from the second inner diameter toward the second outer diameter. A plurality of mating features associated with the first plate and second plate are configured to selectively fix a position of a first workpiece between the first plate and second plate within the first recess and second recess.

Abstract translation: 工件载体包括具有第一外径，第一内径和从第一内径向第一外径延伸第一距离的第一凹槽的第一板。 工件托架还包括具有第二外径，第二内径和从第二内径向第二外径延伸第二距离的第二凹槽的第二板。 与第一板和第二板相关联的多个配合特征被配置为在第一凹部和第二凹部内选择性地将第一工件的位置固定在第一板和第二板之间。

公开(公告)号：WO2017223130A1

公开(公告)日：2017-12-28

申请号：PCT/US2017/038420

申请日：2017-06-21

Applicant: AXCELIS TECHNOLOGIES, INC.

Inventor： KAMENITSA, Dennis ,  RZESZUT, Richard ,  SILVA, Fernando ,  BERINGER, Jason ,  WU, Xiangyang

IPC: C23C14/48 ,  H01J37/317 ,  H01L21/265

Abstract: An ion implantation system (101) is provided having an ion source (108) configured to form an ion beam (116) from aluminum iodide. A beamline assembly selectively transports the ion beam to an end station (106) configured to accept the ion beam for implantation of aluminum ions into a workpiece (128). The ion source may have a solid-state material source (112) having aluminum iodide in a solid form. A solid source vaporizer (146) may vaporize the aluminum iodide, defining gaseous aluminum iodide. An arc chamber (114) may form a plasma from the gaseous aluminum iodide, where arc current from a power supply (110) is configured to dissociate aluminum ions from the aluminum iodide. One or more extraction electrodes (118) may extract the ion beam from the arc chamber. Optionally, a water vapor source (150) further introduces water to react residual aluminum iodide to form hydroiodic acid, where the residual aluminum iodide and hydroiodic acid is evacuated from the system.

Abstract translation: 提供了一种离子注入系统（101），其具有被配置为由碘化铝形成离子束（116）的离子源（108）。 束线组件选择性地将离子束输送到终端站（106），终端站（106）被配置为接受用于将铝离子注入到工件（128）中的离子束。 离子源可以具有固体形式的具有碘化铝的固态材料源（112）。 固体源蒸发器（146）可蒸发碘化铝，从而确定气态碘化铝。 电弧室（114）可以从气态碘化铝形成等离子体，其中来自电源（110）的电弧电流被配置为从铝碘离解铝离子。 一个或多个引出电极（118）可以从电弧室提取离子束。 任选地，水蒸气源（150）进一步引入水以使残余的碘化铝反应以形成氢碘酸，其中残留的碘化铝和氢碘酸从系统中排出。

公开(公告)号：WO2017034758A1

公开(公告)日：2017-03-02

申请号：PCT/US2016/044762

申请日：2016-07-29

Applicant: AXCELIS TECHNOLOGIES, INC.

Inventor： BAGGET, John ,  BERINGER, Jason

IPC: H01J37/08

CPC classification number: H01J37/08 ,  H01J3/04 ,  H01J2237/061 ,  H01J2237/31701

Abstract: An ion source filament clamp (100) has a clamp member (102) having first (104) and second ends (106). The first end has one of a cam surface (132) and a cam follower (134), and has first (110) and second (112) portions that are opposed to one another and separated by a slot (114) having a lead opening (116) defined therein to receive a lead of an ion source filament. An actuator pin (120) extends along an actuator pin axis (126) and has first (122) and second sections. The first section (122) is coupled to the first portion (110) of the clamp member. The actuator pin extends through, and is in sliding engagement with, a thru-hole (128) in the second portion of the clamp member. A cam member (108) is operably coupled to the second section (124) of the actuator pin (120). The cam member has a handle (130) and the other of the cam surface (132) and cam follower (134) and is configured to rotate between a clamped position and an undamped position. The cam follower (134) slidingly contacts the cam surface (132). In the clamped position, the cam follower engages the cam surface in a first predetermined manner, thus selectively compressing the first and second portions (110,112) of the clamp member toward one another and exerting a clamping pressure on the lead within the lead opening (116) while inducing a spring tension between the first and second portions of the clamp member. In the undamped position, the cam follower engages the cam surface in a second predetermined manner, wherein the spring tension extends the first and second portions (110,112) of the clamp member apart from one another, therein releasing the clamping pressure on the lead within the lead opening.

Abstract translation: 离子源灯丝夹具（100）具有具有第一（104）和第二端（106）的夹紧构件（102）。 第一端具有凸轮表面（132）和凸轮从动件（134）中的一个，并且具有第一（110）和第二（112）部分，其彼此相对并且由具有引导开口的槽（114）分隔开 （116），以接收离子源灯丝的引线。 致动器销（120）沿着致动器销轴线（126）延伸并且具有第一（122）和第二部分。 第一部分（122）联接到夹紧构件的第一部分（110）。 致动器销延伸穿过夹紧构件的第二部分中的通孔（128）并与其滑动接合。 凸轮构件（108）可操作地联接到致动器销（120）的第二部分（124）。 凸轮构件具有手柄（130）和凸轮表面（132）和凸轮从动件（134）中的另一个，并且构造成在夹紧位置和无阻尼位置之间旋转。 凸轮从动件（134）滑动地接触凸轮表面（132）。 在夹紧位置，凸轮从动件以第一预定方式接合凸轮表面，从而选择性地将夹紧构件的第一和第二部分（110,112）压向彼此并且在引线开口（116）内的引线上施加夹紧压力 ），同时在夹紧构件的第一和第二部分之间引起弹簧张力。 在无阻尼位置中，凸轮从动件以第二预定方式接合凸轮表面，其中弹簧张力使夹紧构件的第一和第二部分（110,112）彼此分开延伸，从而将夹紧压力释放在引线内 铅开