中科微点-全球专利检索

  1. Login
  2. Sign Up

Search Results

2 records (took 0.022 seconds)

    IMPLANTATION USING SOLID ALUMINUM IODIDE (ALI3) FOR PRODUCING ATOMIC ALUMINUM IONS AND IN SITU CLEANING OF ALUMINUM IODIDE AND ASSOCIATED BY-PRODUCTS
    2.
    发明申请
    IMPLANTATION USING SOLID ALUMINUM IODIDE (ALI3) FOR PRODUCING ATOMIC ALUMINUM IONS AND IN SITU CLEANING OF ALUMINUM IODIDE AND ASSOCIATED BY-PRODUCTS 审中-公开
    使用固体铝酸盐（ALI3）生产原子铝离子以及原位清洗铝酸盐和相关副产物的植入

    公开(公告)号：WO2017223130A1

    公开(公告)日：2017-12-28

    申请号：PCT/US2017/038420

    申请日：2017-06-21

    Applicant: AXCELIS TECHNOLOGIES, INC.

    Inventor： KAMENITSA, Dennis ,  RZESZUT, Richard ,  SILVA, Fernando ,  BERINGER, Jason ,  WU, Xiangyang

    IPC: C23C14/48 ,  H01J37/317 ,  H01L21/265

    Abstract: An ion implantation system (101) is provided having an ion source (108) configured to form an ion beam (116) from aluminum iodide. A beamline assembly selectively transports the ion beam to an end station (106) configured to accept the ion beam for implantation of aluminum ions into a workpiece (128). The ion source may have a solid-state material source (112) having aluminum iodide in a solid form. A solid source vaporizer (146) may vaporize the aluminum iodide, defining gaseous aluminum iodide. An arc chamber (114) may form a plasma from the gaseous aluminum iodide, where arc current from a power supply (110) is configured to dissociate aluminum ions from the aluminum iodide. One or more extraction electrodes (118) may extract the ion beam from the arc chamber. Optionally, a water vapor source (150) further introduces water to react residual aluminum iodide to form hydroiodic acid, where the residual aluminum iodide and hydroiodic acid is evacuated from the system.

    Abstract translation: 提供了一种离子注入系统（101），其具有被配置为由碘化铝形成离子束（116）的离子源（108）。 束线组件选择性地将离子束输送到终端站（106），终端站（106）被配置为接受用于将铝离子注入到工件（128）中的离子束。 离子源可以具有固体形式的具有碘化铝的固态材料源（112）。 固体源蒸发器（146）可蒸发碘化铝，从而确定气态碘化铝。 电弧室（114）可以从气态碘化铝形成等离子体，其中来自电源（110）的电弧电流被配置为从铝碘离解铝离子。 一个或多个引出电极（118）可以从电弧室提取离子束。 任选地，水蒸气源（150）进一步引入水以使残余的碘化铝反应以形成氢碘酸，其中残留的碘化铝和氢碘酸从系统中排出。

Patent Agency Ranking