-
公开(公告)号:US20240300808A1
公开(公告)日:2024-09-12
申请号:US18596223
申请日:2024-03-05
Applicant: Analog Devices, Inc.
Inventor: Kemiao Jia , Gaurav Vohra , Xin Zhang , Christine H. Tsau , Chen Yang , Andrew Proudman , Matthew Kent Emsley , George M. Molnar, II , Nikolay Pokrovskiy , Ali Mohammed Shakir , Michael Judy
CPC classification number: B81C1/00666 , B81B3/0072 , B81B2203/0118 , B81B2203/0307 , B81B2203/0315 , B81C2201/0111 , B81C2201/019
Abstract: Described herein are manufacturing techniques for achieving stress isolation in microelectromechanical systems (MEMS) devices that involve isolation trenches formed from the backside of the substrate. The techniques described herein involve etching a trench in the bottom side of the substrate subsequent to forming a MEMS platform, and processing the MEMS platform to form a MEMS device on the top side of the substrate subsequent to etching the trench.
-
公开(公告)号:US10746696B2
公开(公告)日:2020-08-18
申请号:US15383415
申请日:2016-12-19
Applicant: Analog Devices, Inc.
Inventor: Chen Yang , Yumeng Liu , Li Chen , Kuang L. Yang
IPC: G01N27/447
Abstract: A microfluidic ion detector for detecting heavy metal ions in liquid and particulate matter from gas samples is described. The microfluidic ion detector includes a sample extraction structure for extracting sample ions from a sample liquid or extracting sample ions from the particulate matter of a gas sample, a separation structure for separating sample ions of different types once extracted, and a detection structure for detecting the sample ions. The microfluidic ion detector also includes a reference reservoir providing a reference ion against which the sample may be calibrated based on the operation of the separation structure. A portable, self-calibrating ion detector may be realized by including the described components on a single substrate.
-
公开(公告)号:US20250020629A1
公开(公告)日:2025-01-16
申请号:US18769215
申请日:2024-07-10
Inventor: Phillip Michel Nadeau , David Duncan Lloyd , Michael C.W. Coln , Roman Trogan , Junfei Xia , Marek Hempel , Chen Yang , Ramji Sitaraman Lakshmanan
IPC: G01N33/483 , B01L3/00 , H01L21/311
Abstract: Semiconductor devices can include features to apply electrical stimulation to liquids in which material is present and to measure the response to the electrical stimulation.
-
公开(公告)号:US20180172631A1
公开(公告)日:2018-06-21
申请号:US15383415
申请日:2016-12-19
Applicant: Analog Devices, Inc.
Inventor: Chen Yang , Yumeng Liu , Li Chen , Kuang L. Yang
IPC: G01N27/447
Abstract: A microfluidic ion detector for detecting heavy metal ions in liquid and particulate matter from gas samples is described. The microfluidic ion detector includes a sample extraction structure for extracting sample ions from a sample liquid or extracting sample ions from the particulate matter of a gas sample, a separation structure for separating sample ions of different types once extracted, and a detection structure for detecting the sample ions. The microfluidic ion detector also includes a reference reservoir providing a reference ion against which the sample may be calibrated based on the operation of the separation structure. A portable, self-calibrating ion detector may be realized by including the described components on a single substrate.
-
-
-