公开(公告)号：US20230251161A1

公开(公告)日：2023-08-10

申请号：US18163766

申请日：2023-02-02

Applicant: Applied Materials, Inc.

Inventor： Baochen WU ,  Yangyang SUN ,  Ravi KOMANDURI ,  Jinxin FU ,  Ludovic GODET

IPC: G01M11/02

CPC classification number: G01M11/0207

Abstract: Embodiments described herein relate to an optical device metrology system including a light source to emit a light and a non-polarizing beam splitter to split the light into a first photodetector light path and an optical light path. A first photodetector is disposed in the first photodetector light path and measures a total power of the light. The optical device substrate is disposed in the optical light path and splits the light into a second and a third photodetector light path. A second photodetector is disposed in the second photodetector light path from the optical device substrate. The second photodetector measures a reflected power of the light. A third photodetector is disposed in the third photodetector light path. The third photodetector measures a transmitted power of the light. The controller receives measurements from the first, second, and third photodetectors to calculate a percentage light loss within the optical device substrate.