公开(公告)号：DE59608668D1

公开(公告)日：2002-03-14

申请号：DE59608668

申请日：1996-09-03

Applicant: BASF AG

Inventor： SCHWALM DR ,  FUNHOFF DR ,  BINDER HORST

IPC: G03F7/004 ,  G03F7/039 ,  H01L21/027

Abstract: Positive-working radiation-sensitive mixt. is based on (a) polymer(s) contg. acid-labile gps., which are insol. in water and rendered soluble in aq. alkaline soln. by acid; (b) organic photo-acid(s); and (c) other organic cpd(s)., in which (a) comprises 35-70 mole-% 4-hydroxystyrene units (I), 30-50 mole-% 4-tetrahydropyran-2-yloxystyrene units (II) and 0-15 mole-% 4-vinylcyclohexanol units (III); (b) is 2-methyl-4-hydroxy-5-isopropyl-phenyl-dimethylsulphonium triflate (IV); and (c) is an organic ammonium deriv. (V) of (IV) or an analogue. In the formulae, R', R", R'" = 1-4 C alkyl; or R', R" = CH2 gps. linked to a 5-membered ring.

公开(公告)号：DE59604943D1

公开(公告)日：2000-05-18

申请号：DE59604943

申请日：1996-09-03

Applicant: BASF AG

Inventor： SCHWALM DR ,  FUNHOFF DR ,  BINDER HORST

IPC: G03F7/004 ,  G03F7/039 ,  H01L21/027

Abstract: Positive-working radiation-sensitive mixt. is based on (a) either (a-1) water-insol. organic polymeric binder(s) with acid-labile gps., rendered soluble in aq. alkaline soln. by the action of acid or (a-2.1) a water-insol. polymeric binder, which is soluble in aq. alkaline soln., and (a-2.2) a low mol. organic cpd., which is rendered more soluble in an aq. alkaline developer by the action of an acid; (b) organic photo-acid(s); and opt. (c) organic cpd(s). other than (b). The novelty is that at least one of (a-1), (a-2.1), (a-2.2), (b) and (c) contains a gp. of formula -O N -R4 (I) or (c) is of formula O-CO-Ä(CH2Ün-CH2-N R3 (II); in which R = 1-6 C alkyl; n = 1-6.

公开(公告)号：DE50104094D1

公开(公告)日：2004-11-18

申请号：DE50104094

申请日：2001-12-14

Applicant: BASF AG

Inventor： LANG ORTMUND ,  RUMPF DR ,  FRAUENKRON DR ,  FUNHOFF DR ,  MANDERBACH DR ,  STEIN DR

IPC: C07D487/08

Abstract: The invention relates to the preparation of pure triethylenediamine (TEDA) by evaporating TEDA from the mixture comprising a solvent or diluent, where the solvent or diluent has a boiling point at atmospheric pressure in the range from 175 to 250° C., passing the vapor-form TEDA into a liquid solvent, and subsequently crystallizing the TEDA out of the resultant solution.

公开(公告)号：DE50203442D1

公开(公告)日：2005-07-28

申请号：DE50203442

申请日：2002-05-10

Applicant: BASF AG

Inventor： LANG ORTMUND ,  RUMPF DR ,  FRAUENKRON DR ,  FUNHOFF DR ,  MANDERBACH DR ,  STEIN DR

IPC: C07D487/04 ,  C07D487/08

Abstract: Purification of triethylene diamine (TEDA) comprises crystallization and extraction of the resulting mother liquor with an extraction agent that is at most only slightly miscible with the solvent of the mother liquor but in which TEDA is soluble. Following extraction, the treated mother liquor with reduced TEDA content and/or the extraction agent enriched in TEDA is recycled to the process. A process for the purification of triethylene diamine (TEDA) by evaporation and feeding the TEDA vapor to a liquid solvent followed by crystallization is characterized in that following crystallization of the TEDA the resulting mother liquor is extracted with an extraction agent that is at most only slightly miscible with the solvent of the mother liquor but in which TEDA is soluble. Following extraction, the treated mother liquor with reduced TEDA content and/or the extraction agent enriched in TEDA is recycled to the process.