公开(公告)号：FI923060A

公开(公告)日：1993-01-07

申请号：FI923060

申请日：1992-07-01

Applicant: BASF AG

Inventor： SCHREPP WOLFGANG ,  FUCHS HARALD ,  HOFFMANN BERND F W ,  ERBACH RAINER ,  WEGNER GERHARD ,  SCHAUB MATTHIAS

IPC: G01N27/414 ,  G01N27/22 ,  G01N27/333

Abstract: The invention relates to a miniaturisable, capacitively measuring chemical sensor system on a semiconductor basis, comprising a sensor and a reference element which are to be contacted with the electrolyte to be measured, the reference element being connected in series with the sensor, the reference element comprising a highly doped semiconductor substrate or metal/semiconductor substrate which is coated with a membrane, and the sensor comprising an insulator/semiconductor substrate which is coated with a sensitive membrane, and the sensitive membrane of the sensor being more sensitive than that of the reference element. Sensor and reference element of said sensor system can either be applied to the same chip or consist of individual components which can readily be interchanged.

公开(公告)号：DE4122408A1

公开(公告)日：1993-01-07

申请号：DE4122408

申请日：1991-07-06

Applicant: BASF AG

Inventor： HOFFMANN BERND F W PROF DR ,  ERBACH RAINER ,  VOGEL ALBRECHT ,  WEGNER GERHARD PROF DR ,  FUCHS HARALD DR ,  SCHREPP WOLFGANG DR ,  SCHAUB MATTHIAS

IPC: G01N27/414 ,  G01N27/22 ,  G01N27/333

Abstract: The invention relates to a miniaturisable, capacitively measuring chemical sensor system on a semiconductor basis, comprising a sensor and a reference element which are to be contacted with the electrolyte to be measured, the reference element being connected in series with the sensor, the reference element comprising a highly doped semiconductor substrate or metal/semiconductor substrate which is coated with a membrane, and the sensor comprising an insulator/semiconductor substrate which is coated with a sensitive membrane, and the sensitive membrane of the sensor being more sensitive than that of the reference element. Sensor and reference element of said sensor system can either be applied to the same chip or consist of individual components which can readily be interchanged.

公开(公告)号：DE4209617A1

公开(公告)日：1993-09-30

申请号：DE4209617

申请日：1992-03-25

Applicant: BASF AG

Inventor： WEGNER GERHARD PROF DR ,  WENZ GERHARD ,  SCHAUB MATTHIAS ,  STEIN ARMIN ,  KLEMM DIETER

IPC: C08B16/00 ,  C08J5/18 ,  C08L1/02 ,  B01D71/10 ,  B05D1/20 ,  C08L3/02 ,  C08L5/00 ,  G01L7/08

公开(公告)号：FI923060A0

公开(公告)日：1992-07-01

申请号：FI923060

申请日：1992-07-01

Applicant: BASF AG

Inventor： HOFFMANN BERND F W ,  ERBACH RAINER ,  WEGNER GERHARD ,  FUCHS HARALD ,  SCHREPP WOLFGANG ,  SCHAUB MATTHIAS

IPC: G01N27/414 ,  G01N27/22 ,  G01N27/333 ,  G01N

Abstract: The invention relates to a miniaturisable, capacitively measuring chemical sensor system on a semiconductor basis, comprising a sensor and a reference element which are to be contacted with the electrolyte to be measured, the reference element being connected in series with the sensor, the reference element comprising a highly doped semiconductor substrate or metal/semiconductor substrate which is coated with a membrane, and the sensor comprising an insulator/semiconductor substrate which is coated with a sensitive membrane, and the sensitive membrane of the sensor being more sensitive than that of the reference element. Sensor and reference element of said sensor system can either be applied to the same chip or consist of individual components which can readily be interchanged.