Patent search ap:("BREWER SCIENCE INC") AND inv:"BARNES GREGG A" Page 1

1.

发明专利
BASE-SOLUBLE POLYIMIDE RELEASE LAYERS FOR USE IN MICROLITHOGRAPHIC PROCESSING 未知

公开(公告)号：AU5433890A

公开(公告)日：1990-11-05

申请号：AU5433890

申请日：1990-03-30

Applicant: BREWER SCIENCE INC

Inventor： BREWER TERRY , FLAIM TONY , LAMB JAMES E III , BARNES GREGG A

IPC: C08G73/10 , C08L63/00 , G03F7/09 , G03C5/00 , G03C1/492 , G03C5/12

Patent Agency Ranking