公开(公告)号：AU2018225762A1

公开(公告)日：2019-08-22

申请号：AU2018225762

申请日：2018-02-26

Applicant: BUTTERFLY NETWORK INC

Inventor： FIFE KEITH G ,  ALIE SUSAN A ,  LUTSKY JOSEPH ,  GROSJEAN DAVID ,  ROTHBERG JONATHAN M

IPC: G01H11/00 ,  B06B1/06 ,  H01L21/46 ,  H01L41/04

Abstract: Processes for fabricating capacitive micromachined ultrasonic transducers (CMUTs) are described, as are CMUTs of various doping configurations. An insulating layer separating conductive layers of a CMUT may be formed by forming the layer on a lightly doped epitaxial semiconductor layer. Dopants may be diffused from a semiconductor substrate into the epitaxial semiconductor layer, without diffusing into the insulating layer. CMUTs with different configurations of N-type and P-type doping are also described.

公开(公告)号：CA3052485A1

公开(公告)日：2018-08-30

申请号：CA3052485

申请日：2018-02-26

Applicant: BUTTERFLY NETWORK INC

Inventor： ROTHBERG JONATHAN M ,  FIFE KEITH G ,  ALIE SUSAN A ,  LUTSKY JOSEPH ,  GROSJEAN DAVID

IPC: G01H11/00 ,  B06B1/06 ,  H01L21/46 ,  H01L41/04

Abstract: Processes for fabricating capacitive micromachined ultrasonic transducers (CMUTs) are described, as are CMUTs of various doping configurations. An insulating layer separating conductive layers of a CMUT may be formed by forming the layer on a lightly doped epitaxial semiconductor layer. Dopants may be diffused from a semiconductor substrate into the epitaxial semiconductor layer, without diffusing into the insulating layer. CMUTs with different configurations of N-type and P-type doping are also described.

公开(公告)号：AU2018289454A1

公开(公告)日：2019-12-05

申请号：AU2018289454

申请日：2018-06-20

Applicant: BUTTERFLY NETWORK INC

Inventor： ALIE SUSAN ,  FIFE KEITH ,  LUTSKY JOSEPH ,  GROSJEAN DAVID

IPC: G01N29/22 ,  B06B1/02 ,  G01N29/24

Abstract: An ultrasonic transducer includes a membrane, a bottom electrode, and a plurality of cavities disposed between the membrane and the bottom electrode, each of the plurality of cavities corresponding to an individual transducer cell. Portions of the bottom electrode corresponding to each individual transducer cell are electrically isolated from one another. Each portion of the bottom electrode corresponds to each individual transducer that cell further includes a first bottom electrode portion and a second bottom electrode portion, the first and second bottom electrode portions electrically isolated from one another.

公开(公告)号：CA3064088A1

公开(公告)日：2018-12-27

申请号：CA3064088

申请日：2018-06-20

Applicant: BUTTERFLY NETWORK INC

Inventor： ALIE SUSAN A ,  FIFE KEITH G ,  LUTSKY JOSEPH ,  GROSJEAN DAVID

IPC: G01N29/22 ,  B06B1/02 ,  G01N29/24

Abstract: An ultrasonic transducer includes a membrane, a bottom electrode, and a plurality of cavities disposed between the membrane and the bottom electrode, each of the plurality of cavities corresponding to an individual transducer cell. Portions of the bottom electrode corresponding to each individual transducer cell are electrically isolated from one another. Each portion of the bottom electrode corresponds to each individual transducer that cell further includes a first bottom electrode portion and a second bottom electrode portion, the first and second bottom electrode portions electrically isolated from one another.