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1.
公开(公告)号:CA3111475A1
公开(公告)日:2020-04-02
申请号:CA3111475
申请日:2019-09-27
Applicant: BUTTERFLY NETWORK INC
Inventor: LIU JIANWEI , FIFE KEITH G , LUTSKY JOSEPH , MIAO LINGYUN
Abstract: A method of forming an ultrasound transducer device includes bonding a membrane to a substrate so as to form a sealed cavity between the membrane and the substrate. An exposed surface located within the sealed cavity includes a getter material that is electrically isolated from a bottom electrode of the cavity.
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公开(公告)号:CA3064279A1
公开(公告)日:2018-12-27
申请号:CA3064279
申请日:2018-06-22
Applicant: BUTTERFLY NETWORK INC
Inventor: LUTSKY JOSEPH , SANCHEZ NEVADA J , CHEN KAILIANG , FIFE KEITH G , RALSTON TYLER S
Abstract: Aspects of the technology described herein relate to ultrasound circuits that employ a differential ultrasonic transducer element, such as a differential micromachined ultrasonic transducer (MUT) element. The differential ultrasonic transducer element may be coupled to an integrated circuit that is configured to operate the differential ultrasonic transducer element in one or more modes of operation, such as a differential receive mode, a differential transmit mode, a single-ended receive mode, and a single-ended transmit mode.
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公开(公告)号:AU2018290333A1
公开(公告)日:2019-12-05
申请号:AU2018290333
申请日:2018-06-22
Applicant: BUTTERFLY NETWORK INC
Inventor: LUTSKY JOSEPH , SANCHEZ NEVADA , CHEN KAILIANG , FIFE KEITH , RALSTON TYLER
IPC: B06B1/06 , H01L41/04 , H01L41/047 , H04R19/00
Abstract: Aspects of the technology described herein relate to ultrasound circuits that employ a differential ultrasonic transducer element, such as a differential micromachined ultrasonic transducer (MUT) element. The differential ultrasonic transducer element may be coupled to an integrated circuit that is configured to operate the differential ultrasonic transducer element in one or more modes of operation, such as a differential receive mode, a differential transmit mode, a single-ended receive mode, and a single-ended transmit mode.
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4.
公开(公告)号:AU2018225762A1
公开(公告)日:2019-08-22
申请号:AU2018225762
申请日:2018-02-26
Applicant: BUTTERFLY NETWORK INC
Inventor: FIFE KEITH G , ALIE SUSAN A , LUTSKY JOSEPH , GROSJEAN DAVID , ROTHBERG JONATHAN M
Abstract: Processes for fabricating capacitive micromachined ultrasonic transducers (CMUTs) are described, as are CMUTs of various doping configurations. An insulating layer separating conductive layers of a CMUT may be formed by forming the layer on a lightly doped epitaxial semiconductor layer. Dopants may be diffused from a semiconductor substrate into the epitaxial semiconductor layer, without diffusing into the insulating layer. CMUTs with different configurations of N-type and P-type doping are also described.
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公开(公告)号:CA3081760A1
公开(公告)日:2019-05-23
申请号:CA3081760
申请日:2018-11-15
Applicant: BUTTERFLY NETWORK INC
Inventor: CHEN KAILIANG , SANCHEZ NEVADA J , ALIE SUSAN A , RALSTON TYLER S , ROTHBERG JONATHAN M , FIFE KEITH G , LUTSKY JOSEPH
IPC: A61B8/00 , H01L21/98 , H01L23/535
Abstract: Aspects of the technology described herein relate to an ultrasound device including a first die that includes an ultrasonic transducer, a first application- specific integrated circuit (ASIC) that is bonded to the first die and includes a pulser, and a second ASIC in communication with the second ASIC that includes integrated digital receive circuitry. In some embodiments, the first ASIC may be bonded to the second ASIC and the second ASIC may include analog processing circuitry and an analog-to-digital converter. In such embodiments, the second ASIC may include a through-silicon via (TSV) facilitating communication between the first ASIC and the second ASIC. In some embodiments, SERDES circuitry facilitates communication between the first ASIC and the second ASIC and the first ASIC includes analog processing circuitry and an analog-to-digital converter. In some embodiments, the technology node of the first ASIC is different from the technology node of the second ASIC.
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6.
公开(公告)号:CA3052485A1
公开(公告)日:2018-08-30
申请号:CA3052485
申请日:2018-02-26
Applicant: BUTTERFLY NETWORK INC
Inventor: ROTHBERG JONATHAN M , FIFE KEITH G , ALIE SUSAN A , LUTSKY JOSEPH , GROSJEAN DAVID
Abstract: Processes for fabricating capacitive micromachined ultrasonic transducers (CMUTs) are described, as are CMUTs of various doping configurations. An insulating layer separating conductive layers of a CMUT may be formed by forming the layer on a lightly doped epitaxial semiconductor layer. Dopants may be diffused from a semiconductor substrate into the epitaxial semiconductor layer, without diffusing into the insulating layer. CMUTs with different configurations of N-type and P-type doping are also described.
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7.
公开(公告)号:AU2019350989A1
公开(公告)日:2021-03-25
申请号:AU2019350989
申请日:2019-09-27
Applicant: BUTTERFLY NETWORK INC
Inventor: LIU JIANWEI , FIFE KEITH G , LUTSKY JOSEPH , MIAO LINGYUN
Abstract: A method of forming an ultrasound transducer device includes bonding a membrane to a substrate so as to form a sealed cavity between the membrane and the substrate. An exposed surface located within the sealed cavity includes a getter material that is electrically isolated from a bottom electrode of the cavity.
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公开(公告)号:AU2019263404A1
公开(公告)日:2020-11-19
申请号:AU2019263404
申请日:2019-05-02
Applicant: BUTTERFLY NETWORK INC
Inventor: FIFE KEITH G , LIU JIANWEI , YANG JUNGWOOK , LUTSKY JOSEPH
Abstract: Micromachined ultrasonic transducers having pressure ports are described. The micromachined ultrasonic transducers may comprise flexible membranes configured to vibrate over a cavity. The cavity may be sealed, in some instances by the membrane itself. A pressure port may provide access to the cavity, and thus control of the cavity pressure. In some embodiments, an ultrasound device including an array of micromachined ultrasonic transducers is provided, with pressure ports for at least some of the ultrasonic transducers. The pressure ports may be used to control pressure across the array.
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公开(公告)号:AU2018369882A1
公开(公告)日:2020-05-21
申请号:AU2018369882
申请日:2018-11-15
Applicant: BUTTERFLY NETWORK INC
Inventor: CHEN KAILIANG , SANCHEZ NEVADA J , ALIE SUSAN , RALSTON TYLER S , ROTHBERG JONATHAN M , FIFE KEITH G , LUTSKY JOSEPH
IPC: A61B8/14 , H01L23/535
Abstract: Aspects of the technology described herein relate to an ultrasound device including a first die that includes an ultrasonic transducer, a first application- specific integrated circuit (ASIC) that is bonded to the first die and includes a pulser, and a second ASIC in communication with the second ASIC that includes integrated digital receive circuitry. In some embodiments, the first ASIC may be bonded to the second ASIC and the second ASIC may include analog processing circuitry and an analog-to-digital converter. In such embodiments, the second ASIC may include a through-silicon via (TSV) facilitating communication between the first ASIC and the second ASIC. In some embodiments, SERDES circuitry facilitates communication between the first ASIC and the second ASIC and the first ASIC includes analog processing circuitry and an analog-to-digital converter. In some embodiments, the technology node of the first ASIC is different from the technology node of the second ASIC.
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10.
公开(公告)号:AU2018289454A1
公开(公告)日:2019-12-05
申请号:AU2018289454
申请日:2018-06-20
Applicant: BUTTERFLY NETWORK INC
Inventor: ALIE SUSAN , FIFE KEITH , LUTSKY JOSEPH , GROSJEAN DAVID
Abstract: An ultrasonic transducer includes a membrane, a bottom electrode, and a plurality of cavities disposed between the membrane and the bottom electrode, each of the plurality of cavities corresponding to an individual transducer cell. Portions of the bottom electrode corresponding to each individual transducer cell are electrically isolated from one another. Each portion of the bottom electrode corresponds to each individual transducer that cell further includes a first bottom electrode portion and a second bottom electrode portion, the first and second bottom electrode portions electrically isolated from one another.
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