Pressure port for ultrasonic transducer on CMOS sensor

    公开(公告)号:AU2019263404A1

    公开(公告)日:2020-11-19

    申请号:AU2019263404

    申请日:2019-05-02

    Abstract: Micromachined ultrasonic transducers having pressure ports are described. The micromachined ultrasonic transducers may comprise flexible membranes configured to vibrate over a cavity. The cavity may be sealed, in some instances by the membrane itself. A pressure port may provide access to the cavity, and thus control of the cavity pressure. In some embodiments, an ultrasound device including an array of micromachined ultrasonic transducers is provided, with pressure ports for at least some of the ultrasonic transducers. The pressure ports may be used to control pressure across the array.

    PRESSURE PORT FOR ULTRASONIC TRANSDUCER ON CMOS SENSOR

    公开(公告)号:CA3098911A1

    公开(公告)日:2019-11-07

    申请号:CA3098911

    申请日:2019-05-02

    Abstract: Micromachined ultrasonic transducers having pressure ports are described. The micromachined ultrasonic transducers may comprise flexible membranes configured to vibrate over a cavity. The cavity may be sealed, in some instances by the membrane itself. A pressure port may provide access to the cavity, and thus control of the cavity pressure. In some embodiments, an ultrasound device including an array of micromachined ultrasonic transducers is provided, with pressure ports for at least some of the ultrasonic transducers. The pressure ports may be used to control pressure across the array.

Patent Agency Ranking