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公开(公告)号：WO2018112121A1
公开(公告)日：2018-06-21
申请号：PCT/US2017/066258
申请日：2017-12-14
Applicant: BREWER SCIENCE INC.
Inventor： SWEAT, Daniel , XU, Kui
Abstract: The present invention is broadly concerned with novel directed self-assembly compositions, processes utilizing those compositions, and the resulting structures that are formed. The composition comprises a block copolymer of polystyrene and a polymethylmethacrylate block with polylactic acid side chains ("PS-b-P(MMA-LA)"). The block copolymer is capable of crosslinking and micro-phase separating into lines and spaces measuring about 10-nm or smaller with sub-20 nm L 0 capability. Additionally, PS-b-P(MMA-LA) can be thermally annealed without a top-coat for simpler processing than the prior art. The polylactic acid side chains also increase the etch rate of the poly(methylmethacrylate) block when exposed to oxygen plasma, as well as lower the T g .
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公开(公告)号：WO2022035734A1
公开(公告)日：2022-02-17
申请号：PCT/US2021/045164
申请日：2021-08-09
Applicant: BREWER SCIENCE, INC.
Inventor： ZHONG, Xing-Fu , HUANG, Runhui , XU, Gu , SIMMONS, Sean , SWEAT, Daniel , KOZA, Jakub
Abstract: A high-temperature-stable spin-on-carbon ("SOC") material that fills topography features on a substrate while planarizing the surface in a one-step, thin layer coating process is provided. The material comprises low molecular weight polyimides or diimides that are pre-imidized in solution rather than on the wafer. The SOC layers can survive harsh CVD conditions and are also SCI resistant, especially on TiN and SiOx surfaces.
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公开(公告)号：EP4193221A1
公开(公告)日：2023-06-14
申请号：EP21856496.1
申请日：2021-08-09
Applicant: Brewer Science Inc.
Inventor： ZHONG, Xing-Fu , HUANG, Runhui , XU, Gu , SIMMONS, Sean , SWEAT, Daniel , KOZA, Jakub
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