Abstract:
A microfluidic system with on-chip pumping which can be used for liquid chromatography and also electrospray ionization mass spectrometry and which provides improved efficiency, better integration with sensors, improved portability, reduced power consumption, and reduced cost. The system can include (A) a main chip comprising: a substrate having a front face and a back face; a chromatography column on the front face of said substrate, wherein said column has an inlet and an outlet; an electrospray ionization (ESI) nozzle on the front face of said substrate, wherein said nozzle has an inlet and an outlet, and wherein the inlet of the nozzle is microfluidically coupled to the outlet of the column; one or more pump systems on the front face of said substrate comprising a pump chamber, one or more electrodes, and an outlet microfluidically coupled to the inlet of said column; and (B) a reservoir chip comprising a front surface and a back surface, wherein the reservoir chip has one or more cavities in the back surface which when disposed next to the front surface of the main chip extends the volume of the pump chamber of one of the pump system. Microfabrication can be used to prepare the chips, which can be assembled with a cover and inserted into a testing jig for electronic control and mass spectral analysis. Peptide separations are demonstrated which compete with present commercial systems.
Abstract:
A MEMS electrospray nozzle (320) for mass spectroscopy is disclosed. The nozzle has: a channel field (380) having an inner diameter between 0.3-3 νm; a nozzle tip (390); and a filter structure (370) positioned on the channel field. A method of fabricating the nozzle is also disclosed.