公开(公告)号：WO9624145A3

公开(公告)日：1996-10-17

申请号：PCT/US9600848

申请日：1996-01-19

Applicant: UNIV CALIFORNIA ,  CALIFORNIA INST OF TECHN

Inventor： HO CHIH-MING ,  MIU DENNY K ,  LEU JEREMY TZONG-SHYNG ,  MILLER RAANAN ,  DESAI AMISH ,  LIU CHANG ,  TSAO TOM ,  TAI YU-CHONG

IPC: H01F

CPC classification number: H02K99/00

Abstract: A surface micromachined micromagnetic actuator is provided with a flap (14) using magnetic force as the actuating force. The flap is coupled by one or more beams (16) to a substrate and is cantilevered over the substrate. A Permalloy layer or a magnetic coil (12) is disposed on the flap such that when the flap is placed in a magnetic field, it can be caused to selectively interact and rotate out of the plane of the magnetic actuator. The cantilevered flap is released from the underlying substrate by etching out an underlying sacrificial layer disposed between the flap and the substrate (22). The etched out and now cantilevered flap is magnetically actuated to maintain it out of contact with the substrate while the just etched device is dried in order to obtain high release yields.

公开(公告)号：WO0030167A9

公开(公告)日：2000-11-09

申请号：PCT/US9927500

申请日：1999-11-18

Applicant: CALIFORNIA INST OF TECHN

Inventor： TAI YU-CHONG ,  WANG XUAN-QI ,  DESAI AMISH ,  LEE TERRY D ,  LICKLIDER LAWRENCE

IPC: G01N30/60 ,  G01N30/72 ,  H01J49/04 ,  H01L21/302 ,  B01D59/44

CPC classification number: H01J49/167 ,  G01N30/6095 ,  G01N30/7266 ,  H01J49/0018

Abstract: A MEMS device with an overhanging "polymer" capillary (20) provides vital and significant improvements in interfacing a MEMS electrospray nozzle (50) to an MS inlet or other macroscopic instrumentation. The fabrication methodology associated therewith is easily expanded to include built-in micro particle filters (71) and centimeter long serpentine micro channels (75) provided on-chip (19) and fabricated using a low temperature process.

Abstract translation: 具有悬垂“聚合物”毛细管（20）的MEMS装置提供了将MEMS电喷雾喷嘴（50）连接到MS入口或其他宏观仪器的重要和显着的改进。 与此相关的制造方法容易扩展到包括芯片（19）上提供的内置微粒过滤器（71）和厘米长的蛇形微通道（75），并使用低温工艺制造。

公开(公告)号：EP1166340A4

公开(公告)日：2009-04-22

申请号：EP99965842

申请日：1999-11-18

Applicant: CALIFORNIA INST OF TECHN

Inventor： TAI YU-CHONG ,  WANG XUAN-QI ,  DESAI AMISH ,  LEE TERRY D ,  LICKLIDER LAWRENCE

IPC: G01N30/72 ,  B01D59/44 ,  G01N30/60 ,  H01J49/04 ,  H01L21/302

CPC classification number: H01J49/167 ,  G01N30/6095 ,  G01N30/7266 ,  H01J49/0018

Abstract: A MEMS device with an overhanging "polymer" capillary (20) provides vital and significant improvements in interfacing a MEMS electrospray nozzle (50) to an MS inlet or other macroscopic instrumentation. The fabrication methodology associated therewith is easily expanded to include built-in micro particle filters (71) and centimeter long serpentine micro channels (75) provided on-chip (19) and fabricated using a low temperature process.

公开(公告)号：EP0878013A4

公开(公告)日：2000-04-12

申请号：EP96920094

申请日：1996-01-19

Applicant: UNIV CALIFORNIA ,  CALIFORNIA INST OF TECHN

Inventor： HO CHIH-MING ,  MIU DENNY K ,  LEU JEREMY TZONG-SHYNG ,  MILLER RAANAN ,  DESAI AMISH ,  LIU CHANG ,  TSAO TOM ,  TAI YU-CHONG

IPC: H01F7/00 ,  H02K57/00

CPC classification number: H02K99/00

Abstract: A surface micromachined micromagnetic actuator is provided with a flap (14) using magnetic force as the actuating force. The flap is coupled by one or more beams (16) to a substrate and is cantilevered over the substrate. A Permalloy layer or a magnetic coil (12) is disposed on the flap such that when the flap is placed in a magnetic field, it can be caused to selectively interact and rotate out of the plane of the magnetic actuator. The cantilevered flap is released from the underlying substrate by etching out an underlying sacrificial layer disposed between the flap and the substrate (22). The etched out and now cantilevered flap is magnetically actuated to maintain it out of contact with the substrate while the just etched device is dried in order to obtain high release yields.

公开(公告)号：EP0958593A4

公开(公告)日：2006-08-30

申请号：EP98906009

申请日：1998-01-27

Applicant: CALIFORNIA INST OF TECHN

Inventor： TAI YU-CHONG ,  DESAI AMISH ,  LEE TERRY ,  DAVIS MIKE

IPC: H01J49/04 ,  H01J49/10

CPC classification number: H01J49/167 ,  H01J49/0018 ,  H01J49/04

Abstract: A MEMS electrospray nozzle (320) for mass spectroscopy is disclosed. The nozzle has: a channel field (380) having an inner diameter between 0.3-3 νm; a nozzle tip (390); and a filter structure (370) positioned on the channel field. A method of fabricating the nozzle is also disclosed.

Abstract translation: 公开了用于质谱的MEMS电喷嘴（320）。 该喷嘴具有：内径在0.3-3νm之间的通道区域（380） 一个喷嘴尖端（390）; 和位于通道场上的滤波器结构（370）。 还公开了制造喷嘴的方法。

公开(公告)号：EP1030733A4

公开(公告)日：2000-08-30

申请号：EP98906253

申请日：1998-02-05

Applicant: CALIFORNIA INST OF TECHN

Inventor： DESAI AMISH ,  YANG XING ,  TAI YU-CHONG ,  MARZLUFF ELAINE ,  BOCKENKAMP DIRK ,  MAYO STEPHEN

IPC: B01F5/00 ,  B01F5/02 ,  B01F5/06 ,  B01F13/00 ,  B01J19/00 ,  B01L3/00

CPC classification number: B01L3/5027 ,  B01F5/0256 ,  B01F5/0602 ,  B01F13/0059 ,  B01F2005/0025 ,  B01F2005/0621 ,  B01J19/0093 ,  B01J2219/00783 ,  B01J2219/00797 ,  B01L2300/0816 ,  B01L2300/0867 ,  B01L2300/0883 ,  B01L2400/0487 ,  B01L2400/084 ,  Y10S366/03

Abstract: A micromachined, high Reynolds number, sub-millisecond liquid mixer for the study of chemical reaction kinetics. This bulk micromachined silicon mixer is capable of initiating and quenching chemical reactions in intervals as short as 100 νs. The mixer chip contains two tee mixers (120, 130) connected by one channel which serves a reaction chamber (140). Each tee mixer consists of opposing channels (110, 120) where liquids meet head-on and exit into a third channel (150) forming the base of a 'T'.

Abstract translation: 用于研究化学反应动力学的微机械高雷诺数亚毫秒液体混合器。 这种大型微机械硅混合器能够以100νs的间隔启动和熄灭化学反应。 混合器芯片包含两个T形混合器（120,130），其通过一个用于反应室（140）的通道连接。 每个T形混合器由相对的通道（110,120）组成，在这些通道中液体迎头相接并流出到形成“T”的基部的第三通道（150）中。

公开(公告)号：AU6152498A

公开(公告)日：1998-08-25

申请号：AU6152498

申请日：1998-02-05

Applicant: CALIFORNIA INST OF TECHN

Inventor： DESAI AMISH ,  YANG XING ,  TAI YU-CHONG ,  MARZLUFF ELAINE ,  BOCKENKAMP DIRK ,  MAYO STEPHEN

IPC: B01F5/00 ,  B01F5/02 ,  B01F5/06 ,  B01F13/00 ,  B01J19/00 ,  B01L3/00

Abstract: A micromachined, high Reynolds number, sub-millisecond liquid mixer for the study of chemical reaction kinetics. This bulk micromachined silicon mixer is capable of initiating and quenching chemical reactions in intervals as short as 100 mu s. The mixer chip contains two tee mixers connected by one channel which serves as a reaction chamber. Each tee mixer consists of opposing channels where liquids meet head-on and exit into a third channel forming the base of a "T".

公开(公告)号：DE69632411T2

公开(公告)日：2005-05-19

申请号：DE69632411

申请日：1996-01-19

Applicant: UNIV CALIFORNIA ,  CALIFORNIA INST OF TECHN

Inventor： HO CHIH-MING ,  MIU K ,  LEU TZONG-SHYNG ,  MILLER RAANAN ,  DESAI AMISH ,  LIU CHANG ,  TSAO TOM ,  TAI YU-CHONG

IPC: H01F7/00 ,  H02K57/00

Abstract: A surface micromachined micromagnetic actuator is provided with a flap capable of achieving large deflections above 100 microns using magnetic force as the actuating force. The flap is coupled by one or more beams to a substrate and is cantilevered over the substrate. A Permalloy layer or a magnetic coil is disposed on the flap such that when the flap is placed in a magnetic field, it can be caused to selectively interact and rotate out of the plane of the magnetic actuator. The cantilevered flap is released from the underlying substrate by etching out an underlying sacrificial layer disposed between the flap and the substrate. The etched out and now cantilevered flap is magnetically actuated to maintain it out of contact with the substrate while the just etched device is dried in order to obtain high release yields.

公开(公告)号：AU9792098A

公开(公告)日：1999-04-27

申请号：AU9792098

申请日：1998-10-06

Applicant: CALIFORNIA INST OF TECHN

Inventor： TAI YU-CHONG ,  LEE SAN-WOOK ,  DESAI AMISH

IPC: B03C3/88 ,  B03C5/02 ,  B65G54/02 ,  H02N1/00 ,  B03C3/45

Abstract: Methods and apparatus implementing a technique for electrostatically transporting a particle through a medium. In general, one implementation includes a substrate; a first insulation layer formed on the substrate; a plurality of electrodes arranged in a sequence on the insulation layer, where the electrodes are divided into a plurality of groups and the electrodes are arranged by group; a second insulation layer over at least one of the electrodes; and a phase shift circuit connected to the electrodes which supplies a voltage wave-form to each group of electrodes, where each voltage wave-form for each group is phase-shifted relative to the other phase-shifted wave-forms.

公开(公告)号：DE69632411D1

公开(公告)日：2004-06-09

申请号：DE69632411

申请日：1996-01-19

Applicant: UNIV CALIFORNIA ,  CALIFORNIA INST OF TECHN

Inventor： HO CHIH-MING ,  MIU K ,  LEU TZONG-SHYNG ,  MILLER RAANAN ,  DESAI AMISH ,  LIU CHANG ,  TSAO TOM ,  TAI YU-CHONG

IPC: H01F7/00 ,  H02K57/00

Abstract: A surface micromachined micromagnetic actuator is provided with a flap capable of achieving large deflections above 100 microns using magnetic force as the actuating force. The flap is coupled by one or more beams to a substrate and is cantilevered over the substrate. A Permalloy layer or a magnetic coil is disposed on the flap such that when the flap is placed in a magnetic field, it can be caused to selectively interact and rotate out of the plane of the magnetic actuator. The cantilevered flap is released from the underlying substrate by etching out an underlying sacrificial layer disposed between the flap and the substrate. The etched out and now cantilevered flap is magnetically actuated to maintain it out of contact with the substrate while the just etched device is dried in order to obtain high release yields.