公开(公告)号：WO0030167A9

公开(公告)日：2000-11-09

申请号：PCT/US9927500

申请日：1999-11-18

Applicant: CALIFORNIA INST OF TECHN

Inventor： TAI YU-CHONG ,  WANG XUAN-QI ,  DESAI AMISH ,  LEE TERRY D ,  LICKLIDER LAWRENCE

IPC: G01N30/60 ,  G01N30/72 ,  H01J49/04 ,  H01L21/302 ,  B01D59/44

CPC classification number: H01J49/167 ,  G01N30/6095 ,  G01N30/7266 ,  H01J49/0018

Abstract: A MEMS device with an overhanging "polymer" capillary (20) provides vital and significant improvements in interfacing a MEMS electrospray nozzle (50) to an MS inlet or other macroscopic instrumentation. The fabrication methodology associated therewith is easily expanded to include built-in micro particle filters (71) and centimeter long serpentine micro channels (75) provided on-chip (19) and fabricated using a low temperature process.

Abstract translation: 具有悬垂“聚合物”毛细管（20）的MEMS装置提供了将MEMS电喷雾喷嘴（50）连接到MS入口或其他宏观仪器的重要和显着的改进。 与此相关的制造方法容易扩展到包括芯片（19）上提供的内置微粒过滤器（71）和厘米长的蛇形微通道（75），并使用低温工艺制造。

公开(公告)号：WO2005018770A2

公开(公告)日：2005-03-03

申请号：PCT/US2004026657

申请日：2004-08-17

Applicant: CALIFORNIA INST OF TECHN ,  HOPE CITY ,  TAI YU-CHONG ,  HE QING ,  XIE JUN ,  PANG CHANGLIN ,  LEE TERRY D

Inventor： TAI YU-CHONG ,  HE QING ,  XIE JUN ,  PANG CHANGLIN ,  LEE TERRY D

IPC: G01N30/60 ,  G01N30/64 ,  B01D

CPC classification number: H05K3/284 ,  G01N30/6047 ,  G01N30/6095 ,  G01N2030/645 ,  G03F1/80 ,  G01N2030/625

Abstract: Embodiments in accordance with the present invention relate to packed-column nano-liquid chromatography (nano-LC) systems integrated on-chip, and methods for producing and using same. The microfabricated chip includes a column, frits/filters, an injector, and a detector, fabricated in a process compatible with those conventionally utilized to form integrated circuits. The column can be packed with supports for various different stationary phases to allow performance of different forms of nano-LC, including but not limited to reversed-phase, normal-phase, adsorption, size-exclusion, affinity, and ion chromatography. A cross-channel injector injects a nanolitre/picolitre-volume sample plug at the column inlet. An electrochemical/conductivity sensor integrated at the column outlet measures separation signals. A self-aligned channel-strengthening technique increases pressure rating of the microfluidic system, allowing it to withstand the high pressure normally used in high performance liquid chromatography (HPLC). On-chip sample injection, separation, and detection of mixture of anions in water is successfully demonstrated using ion-exchange nano-LC.

Abstract translation: 根据本发明的实施方案涉及集成在片上的填充柱纳米液相色谱（nano-LC）系统及其制造和使用方法。 微制造的芯片包括柱状物，玻璃料/过滤器，注射器和检测器，以与传统上用于形成集成电路的那些兼容的方法制造。 该柱可以填充有用于各种不同固定相的载体，以允许不同形式的纳米LC的性能，包括但不限于反相，正相，吸附，尺寸排阻，亲和力和离子色谱。 交叉通道注射器在柱入口处注入纳升/皮升体积的样品塞。 集成在色谱柱出口处的电化学/电导率传感器测量分离信号。 自对准的通道加强技术提高了微流体系统的压力等级，使其能够承受通常用于高效液相色谱（HPLC）的高压。 使用离子交换纳米LC成功地证明了在水中阴离子的混合物的片上样品注入，分离和检测。

公开(公告)号：EP1166340A4

公开(公告)日：2009-04-22

申请号：EP99965842

申请日：1999-11-18

Applicant: CALIFORNIA INST OF TECHN

Inventor： TAI YU-CHONG ,  WANG XUAN-QI ,  DESAI AMISH ,  LEE TERRY D ,  LICKLIDER LAWRENCE

IPC: G01N30/72 ,  B01D59/44 ,  G01N30/60 ,  H01J49/04 ,  H01L21/302

CPC classification number: H01J49/167 ,  G01N30/6095 ,  G01N30/7266 ,  H01J49/0018

Abstract: A MEMS device with an overhanging "polymer" capillary (20) provides vital and significant improvements in interfacing a MEMS electrospray nozzle (50) to an MS inlet or other macroscopic instrumentation. The fabrication methodology associated therewith is easily expanded to include built-in micro particle filters (71) and centimeter long serpentine micro channels (75) provided on-chip (19) and fabricated using a low temperature process.

公开(公告)号：EP1673152A4

公开(公告)日：2009-04-01

申请号：EP04786516

申请日：2004-08-17

Applicant: CALIFORNIA INST OF TECHN ,  HOPE CITY

Inventor： TAI YU-CHONG ,  HE QING ,  XIE JUN ,  PANG CHANGLIN ,  LEE TERRY D

IPC: B01D15/08 ,  G01N30/60 ,  G01N30/64

CPC classification number: H05K3/284 ,  G01N30/6047 ,  G01N30/6095 ,  G01N2030/645 ,  G03F1/80 ,  G01N2030/625

Abstract: Embodiments in accordance with the present invention relate to packed-column nano-liquid chromatography (nano-LC) systems integrated on-chip, and methods for producing and using same. The microfabricated chip includes a column, frits/filters, an injector, and a detector, fabricated in a process compatible with those conventionally utilized to form integrated circuits. The column can be packed with supports for various different stationary phases to allow performance of different forms of nano-LC, including but not limited to reversed-phase, normal-phase, adsorption, size-exclusion, affinity, and ion chromatography. A cross-channel injector injects a nanolitre/picolitre-volume sample plug at the column inlet. An electrochemical/conductivity sensor integrated at the column outlet measures separation signals. A self-aligned channel-strengthening technique increases pressure rating of the microfluidic system, allowing it to withstand the high pressure normally used in high performance liquid chromatography (HPLC). On-chip sample injection, separation, and detection of mixture of anions in water is successfully demonstrated using ion-exchange nano-LC.