公开(公告)号：WO0030167A9

公开(公告)日：2000-11-09

申请号：PCT/US9927500

申请日：1999-11-18

Applicant: CALIFORNIA INST OF TECHN

Inventor： TAI YU-CHONG ,  WANG XUAN-QI ,  DESAI AMISH ,  LEE TERRY D ,  LICKLIDER LAWRENCE

IPC: G01N30/60 ,  G01N30/72 ,  H01J49/04 ,  H01L21/302 ,  B01D59/44

CPC classification number: H01J49/167 ,  G01N30/6095 ,  G01N30/7266 ,  H01J49/0018

Abstract: A MEMS device with an overhanging "polymer" capillary (20) provides vital and significant improvements in interfacing a MEMS electrospray nozzle (50) to an MS inlet or other macroscopic instrumentation. The fabrication methodology associated therewith is easily expanded to include built-in micro particle filters (71) and centimeter long serpentine micro channels (75) provided on-chip (19) and fabricated using a low temperature process.

Abstract translation: 具有悬垂“聚合物”毛细管（20）的MEMS装置提供了将MEMS电喷雾喷嘴（50）连接到MS入口或其他宏观仪器的重要和显着的改进。 与此相关的制造方法容易扩展到包括芯片（19）上提供的内置微粒过滤器（71）和厘米长的蛇形微通道（75），并使用低温工艺制造。

公开(公告)号：EP1166340A4

公开(公告)日：2009-04-22

申请号：EP99965842

申请日：1999-11-18

Applicant: CALIFORNIA INST OF TECHN

Inventor： TAI YU-CHONG ,  WANG XUAN-QI ,  DESAI AMISH ,  LEE TERRY D ,  LICKLIDER LAWRENCE

IPC: G01N30/72 ,  B01D59/44 ,  G01N30/60 ,  H01J49/04 ,  H01L21/302

CPC classification number: H01J49/167 ,  G01N30/6095 ,  G01N30/7266 ,  H01J49/0018

Abstract: A MEMS device with an overhanging "polymer" capillary (20) provides vital and significant improvements in interfacing a MEMS electrospray nozzle (50) to an MS inlet or other macroscopic instrumentation. The fabrication methodology associated therewith is easily expanded to include built-in micro particle filters (71) and centimeter long serpentine micro channels (75) provided on-chip (19) and fabricated using a low temperature process.