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    2.
    发明专利
    未知

    公开(公告)号：DE69512625D1

    公开(公告)日：1999-11-11

    申请号：DE69512625

    申请日：1995-12-27

    Applicant: CANON KK

    Inventor： OZAWA KUNITAKA ,  SAKAMOTO EIJI ,  TAKAHASHI KAZUHIRO ,  FUKAGAWA YOUZOU

    IPC: G03F7/20

    Abstract: An illumination system includes a light source (1) for providing pulse light, and a scanning system for relatively and scanningly moving an article (11), to be illuminated, relative to an illumination region to be defined by the pulse light, wherein, in a light intensity distribution defined in the illumination region with respect to a scan direction, the light intensity changes non-linearly from at least one end portion to a highest light intensity point in the distribution, wherein the light intensity distribution includes a first point at the one end portion, a second point whereat light intensity increase changes, a third point whereat light intensity increase changes, and a fourth point whereat the light intensity is highest, and wherein at least one of the width Wa between the first and second points and the width Wb between the third and fourth points substantially corresponds to or is greater than the relative movement amount between the illumination region and the article per pulse.

    4.
    发明专利
    未知

    公开(公告)号：DE69512625T2

    公开(公告)日：2000-04-06

    申请号：DE69512625

    申请日：1995-12-27

    Applicant: CANON KK

    Inventor： OZAWA KUNITAKA ,  SAKAMOTO EIJI ,  TAKAHASHI KAZUHIRO ,  FUKAGAWA YOUZOU

    IPC: G03F7/20

    Abstract: An illumination system includes a light source (1) for providing pulse light, and a scanning system for relatively and scanningly moving an article (11), to be illuminated, relative to an illumination region to be defined by the pulse light, wherein, in a light intensity distribution defined in the illumination region with respect to a scan direction, the light intensity changes non-linearly from at least one end portion to a highest light intensity point in the distribution, wherein the light intensity distribution includes a first point at the one end portion, a second point whereat light intensity increase changes, a third point whereat light intensity increase changes, and a fourth point whereat the light intensity is highest, and wherein at least one of the width Wa between the first and second points and the width Wb between the third and fourth points substantially corresponds to or is greater than the relative movement amount between the illumination region and the article per pulse.

    QUANTITY OF ENERGY CONTROLLER AND EXPOSING SYSTEM
    7.
    发明专利
    QUANTITY OF ENERGY CONTROLLER AND EXPOSING SYSTEM 失效

    公开(公告)号：JPH0983057A

    公开(公告)日：1997-03-28

    申请号：JP23840595

    申请日：1995-09-18

    Applicant: CANON KK

    Inventor： FUKAGAWA YOUZOU ,  MITARAI REIJI

    IPC: G03F7/20 ,  G03B27/72 ,  H01L21/027 ,  H01S3/134 ,  H01S3/225

    Abstract: PROBLEM TO BE SOLVED: To provide a controller for controlling the quantity of energy highly accurately in a short time. SOLUTION: The controller for controlling the quantity of pulse energy by regulating the parameters (e.g. the voltage to be applied to an energy generation source) determining the quantity of pulse energy being oscillated from a pulse energy generation source 1 comprises means 7 for storing the relationship between the parameters and the quantity of pulse energy being oscillated from the pulse energy generation source 1 under that parameters while varying with time.

    STAGE DEVICE AND SYSTEM USING SAME
    8.
    发明专利
    STAGE DEVICE AND SYSTEM USING SAME 失效

    公开(公告)号：JPH06252026A

    公开(公告)日：1994-09-09

    申请号：JP3205393

    申请日：1993-02-22

    Applicant: CANON KK

    Inventor： KORENAGA NOBUSHIGE ,  IWAMOTO KAZUNORI ,  FUKAGAWA YOUZOU ,  ASANO TOSHIYA ,  TAKAHASHI SATORU

    IPC: B23Q1/00 ,  B23Q1/62 ,  B23Q5/22 ,  G03F7/20 ,  G03F9/00 ,  G12B5/00 ,  H01L21/027 ,  H01L21/30 ,  H01L21/68 ,  B23Q1/18

    Abstract: PURPOSE:To materialize a high-speed, accurate, and low-calorification stage device by providing the first drive means for inching, which can drive a mobile stage over a specified range, and the second drive means for rough shifting, which can drive a mobile stage over substantially the same range as the specified range. CONSTITUTION:When positioning it by step shifting, energy such as power, etc., for stepping a stage is turned on for a second drive means 302 to begin with. Thereupon, the second drive means 302 generates thrust geared to the input energy, and steps a mobile stage 300. When the stepping comes closes to end, a switch, which was cutting the output of the first drive means 301, is changed over to the side to connect output, and a first drive means 301 comes to generate the thrust for positioning. Since there is a spring member 303 between the shifting stage 300 and a second drive means 302, the position of the shifting stage 300 can be controlled by the first drive means 301 within the range where it can counter the force of its spring.

    ACTIVE VIBRATION CONTROL DEVICE
    9.
    发明专利
    ACTIVE VIBRATION CONTROL DEVICE 失效

    公开(公告)号：JPH11257417A

    公开(公告)日：1999-09-21

    申请号：JP7503398

    申请日：1998-03-10

    Applicant: CANON KK

    Inventor： FUKAGAWA YOUZOU

    IPC: H01L21/027 ,  F16F15/02 ,  G03F7/20

    Abstract: PROBLEM TO BE SOLVED: To highly sensitively measure the acceleration without mounting an acceleration sensor by measuring a drive force of a stage, measuring a relative distance between the stage and a level block, and calculating a linear sum of a value obtained by second-order differentiating the measured length value by the time and the drive force. SOLUTION: A stage 12 of the mass (m) which can be moved in one direction and a length measuring sensor 13 which is fixed to a level block 11 and positioned in the distance x1 from the reference point (o) are mounted on the level block 11 or an object to be vibration controlled. An actuator 15 which is positioned between the level block 11 and the stage 12 generates a drive force (f). The equation of the motion of the stage 12 is found and sorted to reach X"1 =(f/m)+X"s . The acceleration X"1 of the level block 11 can be thus found by the equation as the sum of a value obtained by dividing the stage drive force (f) by the mass (m) of the stage 12 and a value X"s obtained by second-order differentiating the measured value Xs of the length measuring sensor 13 by the time. When a linear motor is used as the actuator 15 in measuring the drive force (f), the measured value of the current of the motor is used. For example, a controller 18 executes this operation.

    VIBRATION REMOVAL APPARATUS HAVING STATIC DEFORMATION RESTRAINING FUNCTION
    10.
    发明专利
    VIBRATION REMOVAL APPARATUS HAVING STATIC DEFORMATION RESTRAINING FUNCTION 失效

    公开(公告)号：JPH10135126A

    公开(公告)日：1998-05-22

    申请号：JP30578196

    申请日：1996-10-31

    Applicant: CANON KK

    Inventor： FUKAGAWA YOUZOU

    IPC: G03F9/00 ,  F16F15/02 ,  H01L21/027

    Abstract: PROBLEM TO BE SOLVED: To enable restraining of static deformation and stable leveling of a continuous structure in an aligner for a semiconductor manufacturing apparatus. SOLUTION: An air spring 33 for generating a horizontal force is provided as contacted with a housing 32 coupled to a continuous structure 31 as a vibration removal target, and a guide 34 is provided for moving the structure 31 in horizontal two-dimensional directions, in response to a pressure of the spring 33. Further, an air spring 35 for generating a vertical force is provided as contacted with a lower face of the guide 34. A metal spring 36 is mounted to the housing 32. Provided to the structure 31 are a sensor 41 for measuring a horizontal displacement thereof and a sensor 42 for measuring a vertical displacement thereof. Positional information S about movement weight is inputted to a controller 43. Even when the static position of a load applied to the structure 31 is changed, a movement by the guide 34 enables preventing of static deformation thereof.

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